Inventor · disambiguated record
Tetsuro Hanawa
Also filed as: HANAWA TETSURO
10 granted patents·2 pending applications·118 citations·filing 1991–2015
89Inventor score
Files withMITSUBISHI ELECTRIC CORP7RENESAS TECH CORP3RENESAS ELECTRONICS CORP1SEMICONDUCTOR LEADING EDGE TEC1
Top patents by PatentIndex Score
12 records- 0173US5380889AMethod of forming resist pattern and organic silane compound for forming anti-relflection film for use in such methodMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Jan 10, 1995·14 cites·8 claims
- 0273US5270796AApparatus for inspecting a phase shift maskMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Dec 14, 1993·28 cites·9 claims
- 0372US5429910AMethod of forming a critical resist patternMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jul 4, 1995·27 cites·18 claims
- 0469US7727709B2Method of forming resist pattern and method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2007·Granted Jun 1, 2010·2 cites·8 claims
- 0564US9748360B2Manufacturing method of semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2015·Granted Aug 29, 2017·1 cites·14 claims
- 0653US5512422AMethod of forming resist pattern and organic silane compound for forming anti-reflection film for use in such methodMITSUBISHI ELECTRIC CORP·Filed 1994·Granted Apr 30, 1996·7 cites·10 claims
- 0751US5328560AMethod of manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jul 12, 1994·22 cites·15 claims
- 0847US6731375B2Projection aligner, exposing method and semiconductor deviceSEMICONDUCTOR LEADING EDGE TEC·Filed 2001·Granted May 4, 2004·2 cites·9 claims
- 0947US2010203456A1Method of forming resist pattern and method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2010·Application pending·0 cites
- 1044US6057066AMethod of producing photo maskMITSUBISHI ELECTRIC CORP·Filed 1998·Granted May 2, 2000·9 cites·8 claims
- 1143US2007128559A1Material for forming fine pattern, method of forming fine pattern, method of manufacturing electronic device using the same, and electronic device manufactured from the sameRENESAS TECH CORP·Filed 2006·Application pending·0 cites
- 1233US5981146AResist coating filmMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Nov 9, 1999·6 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →