Inventor · disambiguated record
Paul Macdonald
Also filed as: MACDONALD PAUL · MACDONALD PAUL D · MACDONALD PAUL DOUGLAS
7 granted patents·2 pending applications·168 citations·filing 2005–2016
84Inventor score
Top patents by PatentIndex Score
9 records- 0196US8716662B1Methods and apparatus to review defects using scanning electron microscope with multiple electron beam configurationsMACDONALD PAUL·Filed 2012·Granted May 6, 2014·132 cites·8 claims
- 0289US7960670B2Methods of and apparatuses for measuring electrical parameters of a plasma processKLA TENCOR CORP·Filed 2005·Granted Jun 14, 2011·13 cites·18 claims
- 0379US7580767B2Methods of and apparatuses for maintenance, diagnosis, and optimization of processesKLA TENCOR CORP·Filed 2005·Granted Aug 25, 2009·12 cites·21 claims
- 0477US8698037B2Methods of and apparatuses for maintenance, diagnosis, and optimization of processesMUNDT RANDALL S·Filed 2011·Granted Apr 15, 2014·3 cites·7 claims
- 0575US7482576B2Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operationsKLA TENCOR CORP·Filed 2006·Granted Jan 27, 2009·8 cites·25 claims
- 0658US9029728B2Methods of and apparatuses for measuring electrical parameters of a plasma processKLA TENCOR CORP·Filed 2014·Granted May 12, 2015·0 cites·14 claims
- 0749US2009292506A1Methods of and apparatuses for maintenance, diagnosis, and optimization of processesKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 0846US10249546B2Reverse decoration for defect detection amplificationKLA TENCOR CORP·Filed 2016·Granted Apr 2, 2019·0 cites·5 claims
- 0938US2012223227A1Apparatus and methods for real-time three-dimensional sem imaging and viewing of semiconductor wafersCHEN CHIEN-HUEI·Filed 2011·Application pending·0 cites
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