Inventor · disambiguated record
Ilya Bezel
Also filed as: BEZEL ILYA · BEZEL ILYA V
69 granted patents·3 pending applications·305 citations·filing 2007–2024
98Inventor score
Top patents by PatentIndex Score
72 records- 0195US9775226B1Method and system for generating a light-sustained plasma in a flanged transmission elementKLA TENCOR CORP·Filed 2014·Granted Sep 26, 2017·22 cites·46 claims
- 0295US9099292B1Laser-sustained plasma light sourceBEZEL ILYA·Filed 2010·Granted Aug 4, 2015·34 cites·9 claims
- 0394US10217625B2Continuous-wave laser-sustained plasma illumination sourceKLA TENCOR CORP·Filed 2016·Granted Feb 26, 2019·12 cites·45 claims
- 0494US9185788B2Method and system for controlling convection within a plasma cellKLA TENCOR CORP·Filed 2014·Granted Nov 10, 2015·17 cites·54 claims
- 0593US9723703B2System and method for transverse pumping of laser-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Aug 1, 2017·14 cites·31 claims
- 0693US9390902B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·13 cites·19 claims
- 0793US9318311B2Plasma cell for laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2012·Granted Apr 19, 2016·21 cites·46 claims
- 0893US9263238B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Feb 16, 2016·10 cites·39 claims
- 0991US12033845B2Laser-sustained plasma source based on colliding liquid jetsKLA CORP·Filed 2023·Granted Jul 9, 2024·2 cites·19 claims
- 1091US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
- 1191US9927094B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2013·Granted Mar 27, 2018·11 cites·23 claims
- 1290US11978620B2Swirler for laser-sustained plasma light source with reverse vortex flowKLA CORP·Filed 2022·Granted May 7, 2024·2 cites·30 claims
- 1390US10690589B2Laser sustained plasma light source with forced flow through natural convectionKLA TENCOR CORP·Filed 2018·Granted Jun 23, 2020·8 cites·50 claims
- 1490US8259771B1Initiating laser-sustained plasmaSHCHEMELININ ANATOLY·Filed 2010·Granted Sep 4, 2012·18 cites·20 claims
- 1589US11776804B2Laser-sustained plasma light source with reverse vortex flowKLA CORP·Filed 2022·Granted Oct 3, 2023·4 cites·29 claims
- 1689US9530636B2Light source with nanostructured antireflection layerKLA TENCOR CORP·Filed 2015·Granted Dec 27, 2016·7 cites·49 claims
- 1788US11690162B2Laser-sustained plasma light source with gas vortex flowKLA CORP·Filed 2021·Granted Jun 27, 2023·4 cites·29 claims
- 1888US9721761B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Aug 1, 2017·4 cites·70 claims
- 1988US8853655B2Gas refraction compensation for laser-sustained plasma bulbsBEZEL ILYA·Filed 2014·Granted Oct 7, 2014·8 cites·20 claims
- 2087US10806016B2High power broadband illumination sourceKLA TENCOR CORP·Filed 2018·Granted Oct 13, 2020·3 cites·44 claims
- 2187US9615439B2System and method for inhibiting radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Apr 4, 2017·5 cites·31 claims
- 2286US11778720B2High efficiency laser-sustained plasma light source with collection of broadband radiationKLA CORP·Filed 2020·Granted Oct 3, 2023·1 cites·25 claims
- 2386US10244613B2System and method for electrodeless plasma ignition in laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Mar 26, 2019·5 cites·34 claims
- 2486US9558858B2System and method for imaging a sample with a laser sustained plasma illumination outputKLA TENCOR CORP·Filed 2014·Granted Jan 31, 2017·9 cites·31 claims
- 2583US10032620B2Broadband light source including transparent portion with high hydroxide contentKLA TENCOR CORP·Filed 2015·Granted Jul 24, 2018·3 cites·14 claims
- 2682US10381216B2Continuous-wave laser-sustained plasma illumination sourceKLA TENCOR CORP·Filed 2018·Granted Aug 13, 2019·2 cites·17 claims
- 2782US9941655B2High power broadband light sourceKLA TENCOR CORP·Filed 2015·Granted Apr 10, 2018·3 cites·44 claims
- 2882US9526158B1Laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2015·Granted Dec 20, 2016·2 cites·20 claims
- 2981US10887974B2High efficiency laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Jan 5, 2021·2 cites·31 claims
- 3081US8698399B2Multi-wavelength pumping to sustain hot plasmaBEZEL ILYA V·Filed 2010·Granted Apr 15, 2014·8 cites·19 claims
- 3181US8517585B1Full numerical aperture pump of laser-sustained plasmaBEZEL ILYA·Filed 2011·Granted Aug 27, 2013·8 cites·7 claims
- 3280US11035727B2Spectrometer for vacuum ultraviolet measurements in high-pressure environmentKLA TENCOR CORP·Filed 2019·Granted Jun 15, 2021·2 cites·30 claims
- 3380US9655225B2Method and system for controlling convection within a plasma cellKLA TENCOR CORP·Filed 2015·Granted May 16, 2017·2 cites·43 claims
- 3480US8796652B2Laser sustained plasma bulb including waterKLA TENCOR CORP·Filed 2013·Granted Aug 5, 2014·4 cites·20 claims
- 3578US11121521B2System and method for pumping laser sustained plasma with interlaced pulsed illumination sourcesKLA CORP·Filed 2020·Granted Sep 14, 2021·1 cites·34 claims
- 3677US10283342B2Laser sustained plasma light source with graded absorption featuresKLA TENCOR CORP·Filed 2016·Granted May 7, 2019·2 cites·35 claims
- 3775US11262591B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA TENCOR CORP·Filed 2018·Granted Mar 1, 2022·2 cites·27 claims
- 3875US9899205B2System and method for inhibiting VUV radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Feb 20, 2018·2 cites·82 claims
- 3975US7804866B1Pulse stretcherKLA TENCOR TECH CORP·Filed 2007·Granted Sep 28, 2010·4 cites·19 claims
- 4074US10714327B2System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illuminationKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·1 cites·44 claims
- 4173US8658967B2Optically pumping to sustain plasmaBEZEL ILYA·Filed 2012·Granted Feb 25, 2014·4 cites·18 claims
- 4272US12198921B2Laser-sustained plasma light source with tapered windowKLA CORP·Filed 2024·Granted Jan 14, 2025·0 cites·29 claims
- 4372US9709811B2System and method for separation of pump light and collected light in a laser pumped light sourceKLA TENCOR CORP·Filed 2014·Granted Jul 18, 2017·2 cites·49 claims
- 4471US9516733B1Laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2015·Granted Dec 6, 2016·1 cites·14 claims
- 4571US2024138048A1System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sourcesKLA CORP·Filed 2023·Application pending·0 cites
- 4670US10139283B2Non-contact thermal measurements of VUV opticsKLA TENCOR CORP·Filed 2016·Granted Nov 27, 2018·1 cites·20 claims
- 4769US11887835B2Laser-sustained plasma lamps with graded concentration of hydroxyl radicalKLA CORP·Filed 2022·Granted Jan 30, 2024·0 cites·18 claims
- 4869US9512985B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·2 cites·50 claims
- 4969US2021231292A1Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light SourceKLA CORP·Filed 2021·Application pending·0 cites
- 5067US12452987B2High-power compact VUV laser-sustained plasma light sourceKLA CORP·Filed 2024·Granted Oct 21, 2025·0 cites·35 claims
Showing the top 50 of 72 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →