Inventor · disambiguated record
John H. Keller
Also filed as: KELLER JOHN · KELLER JOHN H · KELLER JOHN HOWARD
58 granted patents·7 pending applications·3,161 citations·filing 1975–2018
99Inventor score
Top patents by PatentIndex Score
65 records- 0199US5178739AApparatus for depositing material into high aspect ratio holesIBM·Filed 1991·Granted Jan 12, 1993·429 cites·24 claims
- 0298US5304279ARadio frequency induction/multipole plasma processing toolIBM·Filed 1992·Granted Apr 19, 1994·252 cites·25 claims
- 0398US5206516ALow energy, steered ion beam deposition system having high current at low pressureIBM·Filed 1991·Granted Apr 27, 1993·172 cites·40 claims
- 0497US7670455B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemFEI CO·Filed 2007·Granted Mar 2, 2010·48 cites·30 claims
- 0597US4158589ANegative ion extractor for a plasma etching apparatusIBM·Filed 1977·Granted Jun 19, 1979·72 cites·9 claims
- 0696US7241361B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemFEI CO·Filed 2004·Granted Jul 10, 2007·86 cites·20 claims
- 0796US5505816AEtching of silicon dioxide selectively to silicon nitride and polysiliconIBM·Filed 1993·Granted Apr 9, 1996·328 cites·15 claims
- 0896US4600464APlasma etching reactor with reduced plasma potentialIBM·Filed 1985·Granted Jul 15, 1986·121 cites·11 claims
- 0995US8168957B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemKELLER JOHN·Filed 2010·Granted May 1, 2012·34 cites·22 claims
- 1095US5241245AOptimized helical resonator for plasma processingIBM·Filed 1992·Granted Aug 31, 1993·158 cites·8 claims
- 1194US5767628AHelicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channelIBM·Filed 1995·Granted Jun 16, 1998·98 cites·36 claims
- 1294US5650032AApparatus for producing an inductive plasma for plasma processesIBM·Filed 1995·Granted Jul 22, 1997·92 cites·26 claims
- 1392US6051151AApparatus and method of producing a negative ion plasmaIBM·Filed 1997·Granted Apr 18, 2000·77 cites·25 claims
- 1492US4846920APlasma amplified photoelectron process endpoint detection apparatusIBM·Filed 1987·Granted Jul 11, 1989·53 cites·35 claims
- 1592US4383177AMultipole implantation-isotope separation ion beam sourceIBM·Filed 1980·Granted May 10, 1983·41 cites·9 claims
- 1691US9640367B2Plasma source for a focused ion beam systemFEI CO·Filed 2014·Granted May 2, 2017·9 cites·15 claims
- 1790US5463525AGuard ring electrostatic chuckIBM·Filed 1993·Granted Oct 31, 1995·101 cites·12 claims
- 1890US4135097AIon implantation apparatus for controlling the surface potential of a target surfaceIBM·Filed 1977·Granted Jan 16, 1979·36 cites·6 claims
- 1989US8864935B2Plasma generator apparatusFAIR JAMES A·Filed 2012·Granted Oct 21, 2014·23 cites·19 claims
- 2089US8829468B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemKELLER JOHN·Filed 2012·Granted Sep 9, 2014·8 cites·19 claims
- 2189US6262538B1High density plasma tool with adjustable uniformity and stochastic electron heating for reduced gas crackingIBM·Filed 1999·Granted Jul 17, 2001·55 cites·20 claims
- 2288US5561585AElectrostatic chuck with reference electrodeIBM·Filed 1995·Granted Oct 1, 1996·74 cites·17 claims
- 2388US5189446APlasma wafer processing tool having closed electron cyclotron resonanceIBM·Filed 1991·Granted Feb 23, 1993·58 cites·11 claims
- 2485US5686796AIon implantation helicon plasma source with magnetic dipolesIBM·Filed 1995·Granted Nov 11, 1997·49 cites·15 claims
- 2585US4340461AModified RIE chamber for uniform silicon etchingIBM·Filed 1980·Granted Jul 20, 1982·30 cites·9 claims
- 2682US5880034AReduction of semiconductor structure damage during reactive ion etchingUNIV PRINCETON·Filed 1997·Granted Mar 9, 1999·62 cites·18 claims
- 2780USRE37580EGuard ring electrostatic chuckDORSEY GAGE CO INC·Filed 1999·Granted Mar 12, 2002·49 cites·22 claims
- 2879US5196706AExtractor and deceleration lens for ion beam deposition apparatusIBM·Filed 1991·Granted Mar 23, 1993·33 cites·17 claims
- 2978US6595151B2Planing sailboardK2 KELLER CONSULTING·Filed 2001·Granted Jul 22, 2003·16 cites·21 claims
- 3078US5866985AStable matching networks for plasma toolsIBM·Filed 1996·Granted Feb 2, 1999·69 cites·38 claims
- 3175US6504159B1SOI plasma source ion implantationIBM·Filed 1999·Granted Jan 7, 2003·25 cites·25 claims
- 3275US5207437ACeramic electrostatic wafer chuckIBM·Filed 1991·Granted May 4, 1993·57 cites·7 claims
- 3375US4556823AMulti-function charged particle apparatusIBM·Filed 1983·Granted Dec 3, 1985·17 cites·18 claims
- 3474US4179312AFormation of epitaxial layers doped with conductivity-determining impurities by ion depositionIBM·Filed 1978·Granted Dec 18, 1979·28 cites·15 claims
- 3569US5535507AMethod of making electrostatic chuck with oxide insulatorIBM·Filed 1993·Granted Jul 16, 1996·47 cites·8 claims
- 3668US5332441AApparatus for gettering of particles during plasma processingIBM·Filed 1991·Granted Jul 26, 1994·17 cites·10 claims
- 3767US5783102ANegative ion deductive source for etching high aspect ratio structuresIBM·Filed 1996·Granted Jul 21, 1998·45 cites·17 claims
- 3866US5433258AGettering of particles during plasma processingIBM·Filed 1994·Granted Jul 18, 1995·15 cites·9 claims
- 3964US6838677B2Extraction and deceleration of low energy beam with low beam divergenceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jan 4, 2005·5 cites·28 claims
- 4064US5467249AElectrostatic chuck with reference electrodeIBM·Filed 1993·Granted Nov 14, 1995·28 cites·12 claims
- 4163US5284549ASelective fluorocarbon-based RIE process utilizing a nitrogen additiveIBM·Filed 1992·Granted Feb 8, 1994·36 cites·6 claims
- 4258US8622013B2Sailboard step design with less ventilation and increased speedKELLER JOHN H·Filed 2009·Granted Jan 7, 2014·2 cites·20 claims
- 4358US4149084AApparatus for maintaining ion bombardment beam under improved vacuum conditionIBM·Filed 1977·Granted Apr 10, 1979·9 cites·5 claims
- 4456US5518547AMethod and apparatus for reducing particulates in a plasma tool through steady state flowsIBM·Filed 1993·Granted May 21, 1996·15 cites·14 claims
- 4555US5612851AGuard ring electrostatic chuckIBM·Filed 1995·Granted Mar 18, 1997·15 cites·12 claims
- 4655US5543184AMethod of reducing particulates in a plasma tool through steady state flowsIBM·Filed 1995·Granted Aug 6, 1996·10 cites·9 claims
- 4754US9242699B2Watercraft hull with improved lift, planing speed range, and near maximum efficiencyK2 KELLER CONSULTING LLC·Filed 2013·Granted Jan 26, 2016·1 cites·22 claims
- 4854US4151420AApparatus for the formation of epitaxial layers doped with conductivity-determining impurities by ion depositionIBM·Filed 1977·Granted Apr 24, 1979·14 cites·18 claims
- 4953US2015075718A1Plasma generator apparatusNOVELLUS SYSTEMS INC·Filed 2014·Application pending·0 cites
- 5052US10647385B2Advances in watercraft hull lift, efficiency, and reduced hump drag with increased stabilityKELLER JOHN H·Filed 2018·Granted May 12, 2020·0 cites·17 claims
Showing the top 50 of 65 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →