Inventor · disambiguated record
Sven Lindfors
Also filed as: LINDFORS SVEN · LINDFORS SVEN G
37 granted patents·9 pending applications·7,414 citations·filing 1979–2020
98Inventor score
Top patents by PatentIndex Score
46 records- 0199US7601223B2Showerhead assembly and ALD methodsASM INT·Filed 2004·Granted Oct 13, 2009·607 cites·33 claims
- 0298US9868131B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2015·Granted Jan 16, 2018·414 cites·11 claims
- 0398US8741062B2Apparatus and methods for deposition reactorsLINDFORS SVEN·Filed 2008·Granted Jun 3, 2014·429 cites·19 claims
- 0498US6015590AMethod for growing thin filmsNESTE OY·Filed 1995·Granted Jan 18, 2000·622 cites·10 claims
- 0598US4413022AMethod for performing growth of compound thin filmsCANON KK·Filed 1979·Granted Nov 1, 1983·898 cites·5 claims
- 0698US4389973AApparatus for performing growth of compound thin filmsLOHJA AB OY·Filed 1981·Granted Jun 28, 1983·1.1k cites·2 claims
- 0797US9095869B2Atomic layer deposition with plasma sourceKILPI VAINO·Filed 2011·Granted Aug 4, 2015·360 cites·18 claims
- 0897US6939579B2ALD reactor and method with controlled wall temperatureASM INT·Filed 2001·Granted Sep 6, 2005·372 cites·20 claims
- 0997US6572705B1Method and apparatus for growing thin filmsASM INC·Filed 2000·Granted Jun 3, 2003·117 cites·19 claims
- 1097US5711811AMethod and equipment for growing thin filmsMIKROKEMIA OY·Filed 1995·Granted Jan 27, 1998·1.1k cites·17 claims
- 1195US7799300B2Method and apparatus for removing substances from gasesASM INT·Filed 2008·Granted Sep 21, 2010·374 cites·14 claims
- 1293US7537662B2Method and apparatus for depositing thin films on a surfaceASM INT·Filed 2003·Granted May 26, 2009·46 cites·43 claims
- 1393US6889864B2Source chemical container assemblyASM INTERNATIONAL NV·Filed 2002·Granted May 10, 2005·559 cites·10 claims
- 1492US8753716B2Method of depositing material using a deposition reactorPICOSUN OY·Filed 2013·Granted Jun 17, 2014·4 cites·7 claims
- 1592US7105054B2Method and apparatus of growing a thin film onto a substrateASM INT·Filed 2001·Granted Sep 12, 2006·41 cites·20 claims
- 1691US7498059B2Method for growing thin filmsASM INC·Filed 2007·Granted Mar 3, 2009·8 cites·19 claims
- 1790US8211235B2Apparatuses and methods for deposition of material on surfacesLINDFORS SVEN·Filed 2005·Granted Jul 3, 2012·23 cites·15 claims
- 1889US6881263B2Method of growing a thin film onto a substrateASM MICROCHEMISTRY OY·Filed 2001·Granted Apr 19, 2005·35 cites·36 claims
- 1989US4416933AThin film electroluminescence structureLOHJA AB OY·Filed 1982·Granted Nov 22, 1983·56 cites·6 claims
- 2088US7404984B2Method for growing thin filmsASM INC·Filed 2001·Granted Jul 29, 2008·20 cites·5 claims
- 2186US7018478B2Method of growing a thin film onto a substrateASM INT·Filed 2004·Granted Mar 28, 2006·23 cites·33 claims
- 2286US6783590B2Method of growing a thin film onto a substrateASM INT·Filed 2001·Granted Aug 31, 2004·23 cites·33 claims
- 2386US6506352B1Method for removing substances from gasesASM MICROCHEMISTRY OY·Filed 2000·Granted Jan 14, 2003·39 cites·16 claims
- 2481US7037372B2Method of growing a thin film onto a substrateASM INT·Filed 2004·Granted May 2, 2006·17 cites·32 claims
- 2577US10041169B2System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactorLINDFORS SVEN·Filed 2008·Granted Aug 7, 2018·2 cites·20 claims
- 2677US7060132B2Method and apparatus of growing a thin filmASM INT·Filed 2002·Granted Jun 13, 2006·12 cites·19 claims
- 2775US8507039B2Method for growing thin filmsSUNTOLA TUOMO·Filed 2009·Granted Aug 13, 2013·1 cites·22 claims
- 2874US4396864AElectroluminescent display componentLOHJA AB OY·Filed 1981·Granted Aug 2, 1983·28 cites·7 claims
- 2973US12454754B2Atomic layer deposition reactor comprising a top-loading reaction chamber configured to carry a batch of vertically oriented substratesPICOSUN OY·Filed 2018·Granted Oct 28, 2025·0 cites·16 claims
- 3069USRE48871EMethod and apparatus for depositing thin films on a surfaceASM IP HOLDING BV·Filed 2020·Granted Jan 4, 2022·0 cites·53 claims
- 3168US2013240056A1Apparatus and methods for deposition reactorsLINDFORS SVEN·Filed 2013·Application pending·0 cites
- 3258US12383923B2Atomic layer deposition with plasma sourcePICOSUN OY·Filed 2017·Granted Aug 12, 2025·0 cites·14 claims
- 3356US2015107510A1Coating a substrate web by atomic layer depositionLINDFORS SVEN·Filed 2012·Application pending·0 cites
- 3455US2014335267A1Atomic layer deposition reactor for processing a batch of substrates and method thereofLINDFORS SVEN·Filed 2011·Application pending·0 cites
- 3552US2015125599A1Powder particle coating using atomic layer deposition cartridgeLINDFORS SVEN·Filed 2012·Application pending·0 cites
- 3652US2015167165A1Coating a substrate web by atomic layer depositionLINDFORS SVEN·Filed 2012·Application pending·0 cites
- 3751US2015307989A1Atomic layer deposition method and apparatusesLINDFORS SVEN·Filed 2012·Application pending·0 cites
- 3850US10494718B2Deposition reactor with plasma sourceKILPI VAINO·Filed 2011·Granted Dec 3, 2019·0 cites·15 claims
- 3950US8282334B2Atomic layer deposition apparatus and loading methodsLINDFORS SVEN·Filed 2008·Granted Oct 9, 2012·0 cites·17 claims
- 4048US10011904B2Atomic layer deposition apparatus and loading methodsPICOSUN OY·Filed 2012·Granted Jul 3, 2018·0 cites·13 claims
- 4147US6534431B1Process and apparatus for preparing heterogeneous catalystsFORTUM OIL & GAS OY·Filed 1997·Granted Mar 18, 2003·12 cites·13 claims
- 4247US2007054049A1Method of growing a thin film onto a substrateLINDFORS SVEN·Filed 2006·Application pending·0 cites
- 4346US11326254B2Protecting an interior of a gas container with an ALD coatingPICOSUN OY·Filed 2014·Granted May 10, 2022·0 cites·19 claims
- 4444US4488084AElectroluminescence structureLOHJA AB OY·Filed 1981·Granted Dec 11, 1984·9 cites·4 claims
- 4543US2004079286A1Method and apparatus for the pulse-wise supply of a vaporized liquid reactantFiled 2003·Application pending·0 cites
- 4640US2002187084A1Method and apparatus for removing substances from gasesFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →