Inventor · disambiguated record
Yoshiaki Kohama
Also filed as: KOHAMA YOSHIAKI
14 granted patents·4 pending applications·539 citations·filing 1993–2008
95Inventor score
Technology areasH01J
Top patents by PatentIndex Score
18 records- 0198USRE41665EObject observation apparatus and object observationNIPPON KOGAKU KK·Filed 2007·Granted Sep 14, 2010·57 cites·17 claims
- 0297US7244932B2Electron beam apparatus and device fabrication method using the electron beam apparatusEBARA CORP·Filed 2001·Granted Jul 17, 2007·74 cites·51 claims
- 0396US7439502B2Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2007·Granted Oct 21, 2008·23 cites·7 claims
- 0496USRE40221EObject observation apparatus and object observationNIPPON KOGAKU KK·Filed 2004·Granted Apr 8, 2008·58 cites·24 claims
- 0596US6479819B1Object observation apparatus and object observationNIKON CORP·Filed 2000·Granted Nov 12, 2002·69 cites·6 claims
- 0694US6518582B1Electron beam apparatus, and inspection instrument and inspection process thereofNIKON CORP·Filed 2000·Granted Feb 11, 2003·41 cites·17 claims
- 0794US6184526B1Apparatus and method for inspecting predetermined region on surface of specimen using electron beamNIKON CORP·Filed 1999·Granted Feb 6, 2001·120 cites·32 claims
- 0886US6677587B2Electron beam apparatus, and inspection instrument and inspection process thereofNIKON CORP·Filed 2002·Granted Jan 13, 2004·17 cites·6 claims
- 0972US6670602B1Scanning device and scanning methodNIKON CORP·Filed 1999·Granted Dec 30, 2003·21 cites·11 claims
- 1072US5646403AScanning electron microscopeNIKON CORP·Filed 1995·Granted Jul 8, 1997·22 cites·1 claims
- 1167US6958477B2Electron beam apparatus, and inspection instrument and inspection process thereofNIKON CORP·Filed 2003·Granted Oct 25, 2005·4 cites·10 claims
- 1266US5466936ACharged particle microscopeNIKON CORP·Filed 1993·Granted Nov 14, 1995·19 cites·8 claims
- 1360US5780853AScanning electron microscopeNIKON CORP·Filed 1996·Granted Jul 14, 1998·13 cites·7 claims
- 1460US2008173815A1Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2008·Application pending·0 cites
- 1558US2007034797A1Electron beam apparatus, and inspection instrument and inspection process thereofNIKON CORP·Filed 2006·Application pending·0 cites
- 1655US2006022138A1Electron beam apparatus, and inspection instrument and inspection process thereofNIKON CORP·Filed 2005·Application pending·0 cites
- 1751US6953944B2Scanning device and method including electric charge movementNIKON CORP·Filed 2003·Granted Oct 11, 2005·1 cites·21 claims
- 1836US2002158198A1Charged particle beam apparatusNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →