Inventor · disambiguated record
Michail A. Gallis
Also filed as: GALLIS MICHAIL · GALLIS MICHAIL A
6 granted patents·72 citations·filing 2006–2014
80Inventor score
Top patents by PatentIndex Score
6 records- 0193US7838083B1Ion beam assisted deposition of thermal barrier coatingsSANDIA CORP·Filed 2006·Granted Nov 23, 2010·62 cites·19 claims
- 0279US8585801B1Process and apparatus for separation of components of a gas streamSANDIA CORP·Filed 2013·Granted Nov 19, 2013·3 cites·12 claims
- 0378US9244368B2Particle control near reticle and optics using showerheadDELGADO GILDARDO R·Filed 2013·Granted Jan 26, 2016·3 cites·16 claims
- 0476US9389180B2Methods and apparatus for use with extreme ultraviolet light having contamination protectionKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·2 cites·29 claims
- 0568US8753439B1Process and apparatus for separation of components of a gas streamSANDIA CORP·Filed 2013·Granted Jun 17, 2014·1 cites·2 claims
- 0661US8535424B1Process and apparatus for separation of components of a gas streamBRYAN CHARLES R·Filed 2010·Granted Sep 17, 2013·1 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →