Inventor · disambiguated record
Kazuhiro Kanaya
Also filed as: KANAYA KAZUHIRO
3 granted patents·10 citations·filing 2004–2014
57Inventor score
Top patents by PatentIndex Score
3 records- 0156US7409253B2System and method for processing a substrate and program thereforTOKYO ELECTRON LTD·Filed 2004·Granted Aug 5, 2008·10 cites·19 claims
- 0251US9299540B2Plasma processing apparatus, plasma processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Mar 29, 2016·0 cites·4 claims
- 0345US8864934B2Plasma processing apparatus, plasma processing method, and storage mediumOGI TATSUYA·Filed 2012·Granted Oct 21, 2014·0 cites·5 claims
Join the waitlist — get patent alerts
Get an alert when Kazuhiro Kanaya files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →