Assignee
OGI TATSUYA
JP·4 granted patents·1 pending application·12 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0179US8078311B2Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatusOGI TATSUYA·Filed 2005·Granted Dec 13, 2011·7 cites·8 claims
- 0268US8423176B2Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatusOGI TATSUYA·Filed 2011·Granted Apr 16, 2013·2 cites·6 claims
- 0368US8140181B2Substrate transfer method, control program, and storage medium storing sameOGI TATSUYA·Filed 2009·Granted Mar 20, 2012·3 cites·6 claims
- 0445US8864934B2Plasma processing apparatus, plasma processing method, and storage mediumOGI TATSUYA·Filed 2012·Granted Oct 21, 2014·0 cites·5 claims
- 0539US2012101758A1Method of analyzing cause of abnormality and program analyzing abnormalityOGI TATSUYA·Filed 2011·Application pending·0 cites
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