Inventor · disambiguated record
Ludovic Lattard
Also filed as: LATTARD LUDOVIC
6 granted patents·5 pending applications·23 citations·filing 2006–2023
80Inventor score
Files withASML NETHERLANDS BV4LATTARD LUDOVIC2QIMONDA AG2COMMISSARIAT ENERGIE ATOMIQUE1MAPPER LITHOGRAPHY IP BV1
Top patents by PatentIndex Score
11 records- 0195US10987705B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2020·Granted Apr 27, 2021·4 cites·20 claims
- 0294US9981293B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted May 29, 2018·9 cites·29 claims
- 0392US11738376B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2021·Granted Aug 29, 2023·2 cites·20 claims
- 0488US10632509B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2018·Granted Apr 28, 2020·4 cites·31 claims
- 0583US12202019B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 0662US8018070B2Semiconductor device, method for manufacturing semiconductor devices and mask systems used in the manufacturing of semiconductor devicesQIMONDA AG·Filed 2007·Granted Sep 13, 2011·4 cites·23 claims
- 0745US2007243707A1Hard Mask Layer Stack And A Method Of PatterningQIMONDA AG·Filed 2007·Application pending·0 cites
- 0841US2008061338A1Method for Processing a Structure of a Semiconductor Component, and Structure in a Semiconductor ComponentLATTARD LUDOVIC·Filed 2007·Application pending·0 cites
- 0937US2020096867A1Edge bead removal system and method of treating a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Application pending·0 cites
- 1028US2019057838A1Method for electronic lithography with electrostatic screeningCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2017·Application pending·0 cites
- 1126US2007218627A1Device and a method and mask for forming a deviceLATTARD LUDOVIC·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ludovic Lattard files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →