Inventor · disambiguated record
Premchandra M. Shankar
Also filed as: SHANKAR PREMCHANDRA M
5 granted patents·7 citations·filing 2016–2022
68Inventor score
Top patents by PatentIndex Score
5 records- 0183US11410292B2Equi-probability defect detectionKLA CORP·Filed 2020·Granted Aug 9, 2022·2 cites·20 claims
- 0274US10957033B2Repeater defect detectionKLA TENCOR CORP·Filed 2017·Granted Mar 23, 2021·2 cites·19 claims
- 0372US10062156B2Method and system for detecting defects on a substrateKLA TENCOR CORP·Filed 2016·Granted Aug 28, 2018·3 cites·22 claims
- 0451US12266143B2Salient feature point based image alignmentKLA CORP·Filed 2022·Granted Apr 1, 2025·0 cites·19 claims
- 0551US11127136B2System and method for defining flexible regions on a sample during inspectionKLA CORP·Filed 2020·Granted Sep 21, 2021·0 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →