Inventor · disambiguated record
David Charles Smith
Also filed as: SMITH DAVID · SMITH DAVID C · SMITH DAVID CHARLES · SMITH DAVID E A
52 granted patents·9 pending applications·2,723 citations·filing 1990–2025
99Inventor score
Top patents by PatentIndex Score
61 records- 0199US9911595B1Selective growth of silicon nitrideLAM RES CORP·Filed 2017·Granted Mar 6, 2018·388 cites·17 claims
- 0298US12051589B2Tin oxide thin film spacers in semiconductor device manufacturingLAM RES CORP·Filed 2021·Granted Jul 30, 2024·6 cites·17 claims
- 0398US11784047B2Tin oxide thin film spacers in semiconductor device manufacturingLAM RES CORP·Filed 2021·Granted Oct 10, 2023·10 cites·17 claims
- 0498US11183383B2Tin oxide thin film spacers in semiconductor device manufacturingLAM RES CORP·Filed 2020·Granted Nov 23, 2021·16 cites·18 claims
- 0598US10043656B1Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxideLAM RES CORP·Filed 2017·Granted Aug 7, 2018·24 cites·13 claims
- 0698US9996004B2EUV photopatterning of vapor-deposited metal oxide-containing hardmasksLAM RES CORP·Filed 2015·Granted Jun 12, 2018·398 cites·20 claims
- 0798US9966299B2Inhibitor plasma mediated atomic layer deposition for seamless feature fillLAM RES CORP·Filed 2016·Granted May 8, 2018·365 cites·19 claims
- 0898US9824893B1Tin oxide thin film spacers in semiconductor device manufacturingLAM RES CORP·Filed 2016·Granted Nov 21, 2017·442 cites·19 claims
- 0998US9425078B2Inhibitor plasma mediated atomic layer deposition for seamless feature fillLAM RES CORP·Filed 2015·Granted Aug 23, 2016·454 cites·22 claims
- 1097US11031245B2Tin oxide thin film spacers in semiconductor device manufacturingLAM RES CORP·Filed 2017·Granted Jun 8, 2021·21 cites·18 claims
- 1196US10665429B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2017·Granted May 26, 2020·6 cites·20 claims
- 1296US10199212B2Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxideLAM RES CORP·Filed 2018·Granted Feb 5, 2019·14 cites·20 claims
- 1396US10176984B2Selective deposition of silicon oxideLAM RES CORP·Filed 2017·Granted Jan 8, 2019·11 cites·15 claims
- 1496US9793096B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2015·Granted Oct 17, 2017·16 cites·18 claims
- 1595US10242866B2Selective deposition of silicon nitride on silicon oxide using catalytic controlLAM RES CORP·Filed 2017·Granted Mar 26, 2019·9 cites·17 claims
- 1694US10629429B2Selective deposition of silicon oxideLAM RES CORP·Filed 2018·Granted Apr 21, 2020·6 cites·16 claims
- 1794US10559461B2Selective deposition with atomic layer etch resetLAM RES CORP·Filed 2017·Granted Feb 11, 2020·10 cites·7 claims
- 1894US8960085B2Camera for monitoring functions of a round balerSMITH DAVID C·Filed 2011·Granted Feb 24, 2015·17 cites·20 claims
- 1994US7676046B1Method of removing noise and interference from signalUS NATIONAL SECURITY AGENCY·Filed 2005·Granted Mar 9, 2010·32 cites·12 claims
- 2093US10763108B2Geometrically selective deposition of a dielectric filmLAM RES CORP·Filed 2017·Granted Sep 1, 2020·9 cites·11 claims
- 2192US10490413B2Selective growth of silicon nitrideLAM RES CORP·Filed 2018·Granted Nov 26, 2019·6 cites·19 claims
- 2292US8811812B1Camera rigLAWLER MICHAEL SHAWN·Filed 2014·Granted Aug 19, 2014·31 cites·6 claims
- 2392US6309713B1Deposition of tungsten nitride by plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 1997·Granted Oct 30, 2001·89 cites·16 claims
- 2490US10662526B2Method for selective deposition using a base-catalyzed inhibitorLAM RES CORP·Filed 2018·Granted May 26, 2020·4 cites·19 claims
- 2590US5149596AVapor deposition of thin filmsUS ENERGY·Filed 1990·Granted Sep 22, 1992·84 cites·24 claims
- 2689US10643846B2Selective growth of metal-containing hardmask thin filmsLAM RES CORP·Filed 2018·Granted May 5, 2020·5 cites·19 claims
- 2788US11107683B2Selective growth of metal-containing hardmask thin filmsLAM RES CORP·Filed 2020·Granted Aug 31, 2021·2 cites·17 claims
- 2888US6500742B1Construction of a film on a semiconductor waferAPPLIED MATERIALS INC·Filed 2000·Granted Dec 31, 2002·36 cites·33 claims
- 2987US10777407B2Selective deposition of silicon nitride on silicon oxide using catalytic controlLAM RES CORP·Filed 2019·Granted Sep 15, 2020·3 cites·19 claims
- 3085US10692724B2Atomic layer etching methods and apparatusLAM RES CORP·Filed 2017·Granted Jun 23, 2020·3 cites·16 claims
- 3185US7457756B1Method of generating time-frequency signal representation preserving phase informationUS DIRECTOR OF THE NAT SECURIT·Filed 2005·Granted Nov 25, 2008·18 cites·9 claims
- 3283US10903071B2Selective deposition of silicon oxideLAM RES CORP·Filed 2020·Granted Jan 26, 2021·1 cites·15 claims
- 3381US10998187B2Selective deposition with atomic layer etch resetLAM RES CORP·Filed 2019·Granted May 4, 2021·2 cites·9 claims
- 3481US10100407B2Hardware and process for film uniformity improvementLAM RES CORP·Filed 2014·Granted Oct 16, 2018·1 cites·29 claims
- 3581US9624578B2Method for RF compensation in plasma assisted atomic layer depositionLAM RES CORP·Filed 2014·Granted Apr 18, 2017·2 cites·13 claims
- 3680US6291343B1Plasma annealing of substrates to improve adhesionAPPLIED MATERIALS INC·Filed 1998·Granted Sep 18, 2001·45 cites·24 claims
- 3778US10128116B2Integrated direct dielectric and metal depositionLAM RES CORP·Filed 2017·Granted Nov 13, 2018·2 cites·20 claims
- 3874US10643889B2Pre-treatment method to improve selectivity in a selective deposition processLAM RES CORP·Filed 2018·Granted May 5, 2020·2 cites·19 claims
- 3973US2024030031A1Tin oxide thin film spacers in semiconductor device manufacturingLAM RES CORP·Filed 2023·Application pending·0 cites
- 4072US10526700B2Hardware and process for film uniformity improvementLAM RES CORP·Filed 2018·Granted Jan 7, 2020·0 cites·28 claims
- 4172US7127392B1Device for and method of detecting voice activityUS NATIONAL SECURITY AGENCY·Filed 2003·Granted Oct 24, 2006·20 cites·14 claims
- 4271US6444036B2Construction of a film on a semiconductor waferAPPLIED MATERIALS INC·Filed 2000·Granted Sep 3, 2002·13 cites·11 claims
- 4369US11127567B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2020·Granted Sep 21, 2021·0 cites·24 claims
- 4468US6556967B1Voice activity detectorUS NATIONAL SECURITY AGENCY·Filed 1999·Granted Apr 29, 2003·66 cites·12 claims
- 4568US2025216788A1Bubble defect reductionLAM RES CORP·Filed 2025·Application pending·0 cites
- 4662USD615570SConditioning rollDEERE & CO·Filed 2007·Granted May 11, 2010·12 cites·1 claims
- 4760US12248252B2Bubble defect reductionLAM RES CORP·Filed 2019·Granted Mar 11, 2025·0 cites·7 claims
- 4860US2020312670A1Atomic layer etching methods and apparatusLAM RES CORP·Filed 2020·Application pending·0 cites
- 4955US6251758B1Construction of a film on a semiconductor waferAPPLIED MATERIALS INC·Filed 1997·Granted Jun 26, 2001·11 cites·40 claims
- 5052US7545325B1Method of signal processingUS DIRECTOR THE NAT SECURITY A·Filed 2007·Granted Jun 9, 2009·2 cites·8 claims
Showing the top 50 of 61 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →