Inventor · disambiguated record
Yukinobu Nishibe
Also filed as: NISHIBE YUKINOBU
5 granted patents·10 pending applications·40 citations·filing 2000–2025
73Inventor score
Top patents by PatentIndex Score
15 records- 0176US6299697B1Method and apparatus for processing substrateSHIBAURA MECHATRONICS CORP·Filed 2000·Granted Oct 9, 2001·21 cites·11 claims
- 0274US6363950B2Apparatus for processing substrate using process solutions having desired mixing ratiosSHIBAURA MECHATRONICS CORP·Filed 2001·Granted Apr 2, 2002·19 cites·9 claims
- 0359US2024347364A1Substrate delivery apparatus and substrate delivery methodSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 0455US2025108415A1Cleaning apparatus for wafer storage containerSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 0555US2025112070A1Wafer storage container processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 0655US2025108414A1Cleaning apparatus for wafer storage containerSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 0754US2024328713A1Drying apparatus, dry condition confirmation method, and wafer storage container cleaning apparatusSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 0853US2024302099A1Wafer storage container drying apparatus and cleaning systemSHIBAURA MECHATRONICS CORP·Filed 2024·Application pending·0 cites
- 0953US2024091828A1Cleaning apparatus for wafer storage containerSHIBAURA MECHATRONICS CORP·Filed 2023·Application pending·0 cites
- 1050US2014251386A1Processing apparatus and processing methodTOSHIBA KK·Filed 2014·Application pending·0 cites
- 1146US8141567B2Apparatus and method for photoresist removal processingWAKATSUKI TAKAHIKO·Filed 2007·Granted Mar 27, 2012·0 cites·11 claims
- 1243US2025236470A1Transfer apparatus and wafer storage container cleaning apparatusSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 1341US2007246085A1Apparatus and method for photoresist removal processingTOSHIBA KK·Filed 2007·Application pending·0 cites
- 1437US11906246B2Organic film forming apparatusSHIBAURA MECHATRONICS CORP·Filed 2020·Granted Feb 20, 2024·0 cites·13 claims
- 1536US8517035B2Processing apparatus and methodWAKATSUKI TAKAHIKO·Filed 2007·Granted Aug 27, 2013·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →