Inventor · disambiguated record
Nanchang Zhu
Also filed as: ZHU NANCHANG
12 granted patents·31 citations·filing 2007–2020
85Inventor score
Top patents by PatentIndex Score
12 records- 0190US9553034B1Combined semiconductor metrology systemYOUNG SCOTT A·Filed 2012·Granted Jan 24, 2017·15 cites·28 claims
- 0285US8004290B1Method and apparatus for determining dielectric layer propertiesKLA TENCOR CORP·Filed 2008·Granted Aug 23, 2011·12 cites·35 claims
- 0372US10514391B2Resistivity probe having movable needle bodiesKLA TENCOR CORP·Filed 2017·Granted Dec 24, 2019·1 cites·8 claims
- 0464US11249110B2Resistivity probes with curved portionsKLA TENCOR CORP·Filed 2019·Granted Feb 15, 2022·0 cites·9 claims
- 0560US7724003B1Substrate conditioning for corona charge controlKLA TENCOR CORP·Filed 2007·Granted May 25, 2010·2 cites·20 claims
- 0652US11543431B2Cantilever-type probe with multiple metallic coatingsKLA CORP·Filed 2020·Granted Jan 3, 2023·0 cites·14 claims
- 0750US9030219B2Variable pressure four-point coated probe pin device and methodKLA TENCOR CORP·Filed 2013·Granted May 12, 2015·0 cites·19 claims
- 0846US8804106B2System and method for nondestructively measuring concentration and thickness of doped semiconductor layersZHU NANCHANG·Filed 2012·Granted Aug 12, 2014·1 cites·23 claims
- 0944US10598477B2Dynamic determination of metal film thickness from sheet resistance and TCR valueKLA—TENCOR CORP·Filed 2017·Granted Mar 24, 2020·0 cites·6 claims
- 1041US9435826B2Variable spacing four-point probe pin device and methodKLA TENCOR CORP·Filed 2013·Granted Sep 6, 2016·0 cites·14 claims
- 1138US10663279B2Dynamic determination of metal film thickness from sheet resistance and TCR valueKLA TENCOR CORP·Filed 2017·Granted May 26, 2020·0 cites·16 claims
- 1227US10302677B2Multiple pin probes with support for performing parallel measurementsKLA TENCOR CORP·Filed 2016·Granted May 28, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →