Inventor · disambiguated record
Jonathan D. Mohn
Also filed as: MOHN JONATHAN · MOHN JONATHAN D · MOHN JONATHAN DAVID
16 granted patents·2 pending applications·868 citations·filing 1997–2019
95Inventor score
Top patents by PatentIndex Score
18 records- 0198US6379575B1Treatment of etching chambers using activated cleaning gasAPPLIED MATERIALS INC·Filed 1997·Granted Apr 30, 2002·375 cites·47 claims
- 0298US6095084AHigh density plasma process chamberAPPLIED MATERIALS INC·Filed 1997·Granted Aug 1, 2000·250 cites·86 claims
- 0393US9719169B2System and apparatus for flowable deposition in semiconductor fabricationMOHN JONATHAN D·Filed 2011·Granted Aug 1, 2017·31 cites·18 claims
- 0492US9728380B2Dual-plenum showerhead with interleaved plenum sub-volumesNOVELLUS SYSTEMS INC·Filed 2015·Granted Aug 8, 2017·11 cites·20 claims
- 0591US7972444B2Workpiece support with fluid zones for temperature controlMATTSON TECH INC·Filed 2007·Granted Jul 5, 2011·20 cites·20 claims
- 0691US7011039B1Multi-purpose processing chamber with removable chamber linerAPPLIED MATERIALS INC·Filed 2000·Granted Mar 14, 2006·41 cites·11 claims
- 0791US6401652B1Plasma reactor inductive coil antenna with flat surface facing the plasmaAPPLIED MATERIALS INC·Filed 2000·Granted Jun 11, 2002·42 cites·42 claims
- 0890US9916977B2Low k dielectric deposition via UV driven photopolymerizationLAM RES CORP·Filed 2015·Granted Mar 13, 2018·7 cites·17 claims
- 0987US9121097B2Variable showerhead flow by varying internal baffle conductanceMOHN JONATHAN D·Filed 2012·Granted Sep 1, 2015·10 cites·23 claims
- 1086US9184072B2Advanced multi-workpiece processing chamberDEVINE DANIEL J·Filed 2007·Granted Nov 10, 2015·16 cites·45 claims
- 1185US7042619B1Mirror structure with single crystal silicon cross-memberMIRADIA INC·Filed 2004·Granted May 9, 2006·35 cites·37 claims
- 1284US6598615B1Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamberAPPLIED MATERIALS INC·Filed 2000·Granted Jul 29, 2003·20 cites·13 claims
- 1376US10388546B2Apparatus for UV flowable dielectricLAM RES CORP·Filed 2015·Granted Aug 20, 2019·2 cites·9 claims
- 1473US11270896B2Apparatus for UV flowable dielectricLAM RES CORP·Filed 2019·Granted Mar 8, 2022·1 cites·12 claims
- 1567US7369297B2Mirror structure with single crystal silicon cross-memberMIRADIA INC·Filed 2005·Granted May 6, 2008·4 cites·33 claims
- 1659US7355781B2Spatial light modulator with perforated hingeGEHODE CORP·Filed 2006·Granted Apr 8, 2008·3 cites·29 claims
- 1742US2018128647A1Device and method to control the uniformity of a gas flow in a cvd or an ald reactor or of a layer grown thereinAIXTRON SE·Filed 2016·Application pending·0 cites
- 1835US2007051471A1Methods and apparatus for strippingAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →