Inventor · disambiguated record
Larry Birch
Also filed as: BIRCH LARRY J
1 granted patent·1 pending application·20 citations·filing 2002–2006
43Inventor score
Technology areasB24B
Files withMICRON TECHNOLOGY INC2
Top patents by PatentIndex Score
2 records- 0177US7169014B2Apparatuses for controlling the temperature of polishing pads used in planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 30, 2007·20 cites·55 claims
- 0243US2007054599A1Apparatus and method of controlling the temperature of polishing pads used in planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →