Inventor · disambiguated record
Kwang-Myung Lee
Also filed as: LEE KWANG-MYUNG
4 granted patents·4 pending applications·50 citations·filing 2002–2008
75Inventor score
Top patents by PatentIndex Score
8 records- 0182US6869500B2Method for processing a wafer and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Mar 22, 2005·35 cites·36 claims
- 0276US7497963B2Etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 3, 2009·7 cites·11 claims
- 0374US8361274B2Etching apparatus and etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jan 29, 2013·6 cites·12 claims
- 0461US8083507B2Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaftPARK TEA-JIN·Filed 2008·Granted Dec 27, 2011·2 cites·15 claims
- 0542US2005130451A1Method for processing a wafer and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 0640US2010206519A1Temperature control system for semiconductor manufacturing equipmentGLOBAL STANDARD TECHNOLOGY CO·Filed 2007·Application pending·0 cites
- 0740US2007181062A1Semiconductor device manufacturing apparatus including temperature measuring unitKIM IL-KYOUNG·Filed 2007·Application pending·0 cites
- 0838US2005087139A1Antenna for use in producing plasma and plasma processing apparatus comprising the sameFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →