Inventor · disambiguated record
Noriaki Yokono
Also filed as: YOKONO NORIAKI
4 granted patents·133 citations·filing 1993–2010
78Inventor score
Top patents by PatentIndex Score
4 records- 0184US5436848AMethod of and device for transporting semiconductor substrate in semiconductor processing systemDAINIPPON SCREEN MFG·Filed 1993·Granted Jul 25, 1995·102 cites·60 claims
- 0274US8477301B2Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatusKASHIYAMA MASAHITO·Filed 2010·Granted Jul 2, 2013·4 cites·10 claims
- 0357US6963789B2Substrate processing apparatus control system and substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted Nov 8, 2005·8 cites·12 claims
- 0454US6053058AAtmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Apr 25, 2000·19 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →