Assignee
KASHIYAMA MASAHITO
JP·4 granted patents·1 pending application·7 citations·filing 2010–2013
Top patents by PatentIndex Score
5 records- 0174US8477301B2Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatusKASHIYAMA MASAHITO·Filed 2010·Granted Jul 2, 2013·4 cites·10 claims
- 0272US9508573B2Substrate processing apparatus and substrate processing methodKASHIYAMA MASAHITO·Filed 2012·Granted Nov 29, 2016·3 cites·10 claims
- 0340US9685363B2Alignment device and substrate processing apparatusKASHIYAMA MASAHITO·Filed 2013·Granted Jun 20, 2017·0 cites·7 claims
- 0440US9465293B2Substrate processing apparatus and substrate processing methodKASHIYAMA MASAHITO·Filed 2013·Granted Oct 11, 2016·0 cites·9 claims
- 0540US2013312658A1Substrate processing apparatusKASHIYAMA MASAHITO·Filed 2013·Application pending·0 cites
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