Inventor · disambiguated record
Satoru Toyoda
Also filed as: TOYODA SATORU
8 granted patents·12 pending applications·105 citations·filing 1988–2013
82Inventor score
Top patents by PatentIndex Score
20 records- 0182US6280585B1Sputtering apparatus for filling pores of a circular substrateULVAC INC·Filed 1997·Granted Aug 28, 2001·71 cites·2 claims
- 0266US4816046AFine particle collector trap for vacuum evacuating systemULVAC CORP·Filed 1988·Granted Mar 28, 1989·28 cites·5 claims
- 0363US9005413B2Film formation apparatusKODAIRA SHUJI·Filed 2010·Granted Apr 14, 2015·4 cites·2 claims
- 0462US8158197B2Method for forming tantalum nitride filmGONOHE NARISHI·Filed 2006·Granted Apr 17, 2012·2 cites·9 claims
- 0551US2009095617A1Bias sputtering film forming process and bias sputtering film forming apparatusULVAC INC·Filed 2008·Application pending·0 cites
- 0648US8105468B2Method for forming tantalum nitride filmGONOHE NARISHI·Filed 2006·Granted Jan 31, 2012·0 cites·13 claims
- 0746US2009120787A1Method of manufacturing semiconductor deviceULVAC INC·Filed 2009·Application pending·0 cites
- 0844US2014048413A1Film-forming apparatusULVAC INC·Filed 2013·Application pending·0 cites
- 0943US2013239993A1Film-forming apparatus and method for cleaning film-forming apparatusOGAWA YOHEI·Filed 2011·Application pending·0 cites
- 1039US8796142B2Method for forming tantalum nitride filmGONOHE NARISHI·Filed 2006·Granted Aug 5, 2014·0 cites·7 claims
- 1139US8158198B2Method for forming tantalum nitride filmGONOHE NARISHI·Filed 2006·Granted Apr 17, 2012·0 cites·13 claims
- 1239US2004050687A1Bias sputtering film forming process and bias sputtering film forming apparatusULVAC INC·Filed 2003·Application pending·0 cites
- 1338US2009078580A1Method for Forming Cu FilmULVAC INC·Filed 2006·Application pending·0 cites
- 1438US2009162565A1Method for Forming Tantalum Nitride FilmGONOHE NARISHI·Filed 2006·Application pending·0 cites
- 1538US2008199601A1Method for Forming Tantalum Nitride FilmGONOHE NARISHI·Filed 2006·Application pending·0 cites
- 1637US8809193B2Method for the formation of Co film and method for the formation of Cu interconnection filmKUMAMOTO SHOICHIRO·Filed 2010·Granted Aug 19, 2014·0 cites·35 claims
- 1732US2012111722A1Film-forming apparatusKODAIRA SHUJI·Filed 2010·Application pending·0 cites
- 1824US2012097527A1Film formation apparatus and film forming methodKODAIRA SHUJI·Filed 2010·Application pending·0 cites
- 1923US2012121818A1Coating surface processing method and coating surface processing apparatusKODAIRA SHUJI·Filed 2010·Application pending·0 cites
- 2023US2012118732A1Film formation apparatusKODAIRA SHUJI·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →