Assignee
KUMAMOTO SHOICHIRO
JP·2 granted patents·0 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0141US8476161B2Method for forming Cu electrical interconnection filmKUMAMOTO SHOICHIRO·Filed 2009·Granted Jul 2, 2013·0 cites·10 claims
- 0237US8809193B2Method for the formation of Co film and method for the formation of Cu interconnection filmKUMAMOTO SHOICHIRO·Filed 2010·Granted Aug 19, 2014·0 cites·35 claims
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