Inventor · disambiguated record
Kyoji Tokunaga
Also filed as: TOKUNAGA KYOJI
3 granted patents·1 pending application·71 citations·filing 1991–2004
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0176US5290736AMethod of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmosphericKAWASAKI STEEL CO·Filed 1991·Granted Mar 1, 1994·62 cites·8 claims
- 0241US2004209455A1Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating filmKAWASAKI MICROELECTRONICS INC·Filed 2004·Application pending·0 cites
- 0340US6423651B1Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating filmKAWASAKI STEEL CO·Filed 1994·Granted Jul 23, 2002·9 cites·34 claims
- 0439US6828258B2Method of forming an insulating film having SI-C, SI-O and SI-H bonds to cover wiringlines of a semiconductor deviceKAWASAKI MICROELECTRONICS INC·Filed 2002·Granted Dec 7, 2004·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →