Inventor · disambiguated record
Kim Vellore
Also filed as: VELLORE KIM · VELLORE KIM R · VELLORE KIM RAMKUMAR
19 granted patents·16 pending applications·590 citations·filing 2000–2024
91Inventor score
Top patents by PatentIndex Score
35 records- 0196US6598559B1Temperature controlled chamberAPPLIED MATERIALS INC·Filed 2000·Granted Jul 29, 2003·573 cites·36 claims
- 0288US9696097B2Multi-substrate thermal management apparatusAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·8 cites·18 claims
- 0384US10109514B2Visual feedback for process control in RTP chambersAPPLIED MATERIALS INC·Filed 2017·Granted Oct 23, 2018·3 cites·22 claims
- 0478US9735034B2Visual feedback for process control in RTP chambersAPPLIED MATERIALS INC·Filed 2014·Granted Aug 15, 2017·3 cites·17 claims
- 0574US9959610B2System and method to detect substrate and/or substrate support misalignment using imagingAPPLIED MATERIALS INC·Filed 2015·Granted May 1, 2018·2 cites·16 claims
- 0668US11183411B2Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiencyAPPLIED MATERIALS INC·Filed 2021·Granted Nov 23, 2021·0 cites·18 claims
- 0760US12134835B2Quartz susceptor for accurate non-contact temperature measurementAPPLIED MATERIALS INC·Filed 2021·Granted Nov 5, 2024·0 cites·20 claims
- 0859US2025236987A1Silicon carbide and quartz compositions for processing chambers, and related components and methodsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0958US2025029850A1Methods of analyzing uniformity, and related apparatus and systems, for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1057US10916464B1Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiencyAPPLIED MATERIALS INC·Filed 2019·Granted Feb 9, 2021·0 cites·13 claims
- 1157US9390926B2Process sheet resistance uniformity improvement using multiple melt laser exposuresAPPLIED MATERIALS INC·Filed 2014·Granted Jul 12, 2016·0 cites·18 claims
- 1255US2010071752A1Solar Cell Module Having Buss Adhered With Conductive AdhesiveAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1354US12230521B2Method for non-contact low substrate temperature measurementAPPLIED MATERIALS INC·Filed 2020·Granted Feb 18, 2025·0 cites·20 claims
- 1454US9953851B2Process sheet resistance uniformity improvement using multiple melt laser exposuresAPPLIED MATERIALS INC·Filed 2016·Granted Apr 24, 2018·0 cites·18 claims
- 1554US2025027202A1Methods of adjusting uniformity, and related apparatus and systems, for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1653US2025132175A1Actively controlled window for epitaxial deposition process temperature controlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1752US11414740B2Processing system for forming layersAPPLIED MATERIALS INC·Filed 2020·Granted Aug 16, 2022·0 cites·22 claims
- 1852US2023352322A1Multi-zone lamp heating for chemical vapor depositionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1951US11538706B2System and method for aligning a mask with a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 2051US11047039B2Substrate carrier having hard maskAPPLIED MATERIALS INC·Filed 2018·Granted Jun 29, 2021·0 cites·20 claims
- 2150US11637004B2Alignment module with a cleaning chamberAPPLIED MATERIALS INC·Filed 2020·Granted Apr 25, 2023·0 cites·18 claims
- 2250US11469124B2Contactless latch and coupling for vacuum wafer transfer cassetteAPPLIED MATERIALS INC·Filed 2020·Granted Oct 11, 2022·0 cites·20 claims
- 2350US11196360B2System and method for electrostatically chucking a substrate to a carrierAPPLIED MATERIALS INC·Filed 2019·Granted Dec 7, 2021·0 cites·19 claims
- 2450US7567885B2Method and system for determining object heightSOKUDO CO LTD·Filed 2007·Granted Jul 28, 2009·1 cites·24 claims
- 2549US11756816B2Carrier FOUP and a method of placing a carrierAPPLIED MATERIALS INC·Filed 2019·Granted Sep 12, 2023·0 cites·20 claims
- 2647US2011140726A1Apparatus and Methods for Measuring Solar Cell Module PerformanceAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 2746US2009179366A1Apparatus for supporting a substrate during semiconductor processing operationsSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 2846US2009109595A1Method and system for performing electrostatic chuck clamping in track lithography toolsSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 2945US2008224817A1Interlaced rtd sensor for zone/average temperature sensingSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 3045US2008153182A1Method and system to measure and compensate for substrate warpage during thermal processingSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 3144US2015131698A1Low temperature rtp control using ir cameraAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3244US2008160462A1Method and system for bake plate heat transfer control in track lithography toolsSOKUDO CO LTD·Filed 2007·Application pending·0 cites
- 3342US2007294870A1Multi-stage flow control apparatus and method of useAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 3439US2018374736A1Electrostatic carrier for die bonding applicationsAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 3538US2019115241A1Hydrophobic electrostatic chuckAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →