Inventor · disambiguated record
Sergei Shulepov
Also filed as: SHULEPOV SERGEI · SHULEPOV SERGEI Y · SHULEPOV SERGEI YURIEVICH
38 granted patents·5 pending applications·191 citations·filing 2004–2023
97Inventor score
Files withASML NETHERLANDS BV25KEMPER NICOLAAS RUDOLF4LEENDERS MARTINUS HENDRIKUS ANTONIUS3STAVENGA MARCO KOERT2STREEFKERK BOB2
Top patents by PatentIndex Score
43 records- 0197US9952515B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 24, 2018·6 cites·20 claims
- 0296US9134623B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 15, 2015·8 cites·21 claims
- 0396US9134622B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Sep 15, 2015·9 cites·29 claims
- 0496US8634056B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2011·Granted Jan 21, 2014·10 cites·21 claims
- 0596US7804577B2Lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·26 cites·44 claims
- 0696US7528929B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 5, 2009·46 cites·35 claims
- 0795US10345712B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 9, 2019·3 cites·20 claims
- 0893US8027019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 27, 2011·15 cites·25 claims
- 0992US8547519B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2009·Granted Oct 1, 2013·8 cites·18 claims
- 1091US8421996B2Lithographic apparatusLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Apr 16, 2013·7 cites·20 claims
- 1191US8144305B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2006·Granted Mar 27, 2012·14 cites·36 claims
- 1288US7834974B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Nov 16, 2010·9 cites·22 claims
- 1386US9448494B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 20, 2016·3 cites·20 claims
- 1485US9927715B2Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Mar 27, 2018·2 cites·20 claims
- 1585US9059228B2Substrate table, immersion lithographic apparatus and device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Jun 16, 2015·6 cites·22 claims
- 1684US12117721B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Oct 15, 2024·0 cites·20 claims
- 1780US9099501B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2010·Granted Aug 4, 2015·3 cites·20 claims
- 1880US8675169B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2011·Granted Mar 18, 2014·4 cites·20 claims
- 1978US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 2077US12197140B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 2176US11537038B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 2275US9766556B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Sep 19, 2017·1 cites·20 claims
- 2371US2019324374A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 2470US8023101B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 20, 2011·2 cites·46 claims
- 2569US9477158B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2006·Granted Oct 25, 2016·2 cites·20 claims
- 2668US8711326B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodVAN DER HAM RONALD·Filed 2011·Granted Apr 29, 2014·2 cites·20 claims
- 2766US11215933B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jan 4, 2022·0 cites·19 claims
- 2866USRE48676ELithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Aug 10, 2021·0 cites·40 claims
- 2963US10871714B2Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Dec 22, 2020·0 cites·20 claims
- 3059US10451980B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 22, 2019·0 cites·21 claims
- 3159USRE47237ELithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 12, 2019·0 cites·40 claims
- 3257US9235113B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2011·Granted Jan 12, 2016·0 cites·27 claims
- 3355US10866501B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2011·Granted Dec 15, 2020·0 cites·25 claims
- 3455US10802410B2Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquidASML NETHERLANDS BV·Filed 2016·Granted Oct 13, 2020·0 cites·21 claims
- 3555US9625833B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 18, 2017·0 cites·20 claims
- 3655US8262281B2Device for mixing a liquid mediumVAN DEN BIJGAART ADRIANUS WILHELMUS DIONISIUS MARI·Filed 2006·Granted Sep 11, 2012·1 cites·20 claims
- 3753US8681311B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2011·Granted Mar 25, 2014·0 cites·6 claims
- 3853US2025352168A1Apparatus for performing non-invasive thermodilutionKONINKLIJKE PHILIPS NV·Filed 2023·Application pending·0 cites
- 3953US2011228238A1Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 4050US8767169B2Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing methodROSET NIEK JACOBUS JOHANNES·Filed 2011·Granted Jul 1, 2014·0 cites·20 claims
- 4145US2009296068A1Substrate table, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 4241US2008298066A1Lamp UnitKONINKL PHILIPS ELECTRONICS NV·Filed 2005·Application pending·0 cites
- 4339US9618835B2Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressureDIRECKS DANIEL JOZEF MARIA·Filed 2011·Granted Apr 11, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →