Inventor · disambiguated record
Yuka Hayami
Also filed as: HAYAMI YUKA
6 granted patents·1 pending application·86 citations·filing 1993–2007
82Inventor score
Files withFUJITSU LTD7
Top patents by PatentIndex Score
7 records- 0169US5474616AMethod for rinsing plate-shaped articlesFUJITSU LTD·Filed 1993·Granted Dec 12, 1995·42 cites·2 claims
- 0268US7294577B2Method of manufacturing a silicide layerFUJITSU LTD·Filed 2005·Granted Nov 13, 2007·3 cites·19 claims
- 0358US5927302AMethod for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the sameFUJITSU LTD·Filed 1995·Granted Jul 27, 1999·21 cites·13 claims
- 0450US7319066B2Semiconductor device and method for fabricating the sameFUJITSU LTD·Filed 2004·Granted Jan 15, 2008·6 cites·20 claims
- 0546US5795494ASemiconductor substrate cleaning method and semiconductor device fabrication methodFUJITSU LTD·Filed 1995·Granted Aug 18, 1998·14 cites·11 claims
- 0643US2008283924A1Semiconductor device and method for fabricating the sameFUJITSU LTD·Filed 2007·Application pending·0 cites
- 0737US7030026B2Semiconductor device fabrication methodFUJITSU LTD·Filed 2003·Granted Apr 18, 2006·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →