Inventor · disambiguated record
Matt Hankinson
Also filed as: HANKINSON MATT
6 granted patents·1 pending application·669 citations·filing 2001–2008
87Inventor score
Top patents by PatentIndex Score
7 records- 0197US6673638B1Method and apparatus for the production of process sensitive lithographic featuresKLA TENCOR CORP·Filed 2002·Granted Jan 6, 2004·393 cites·14 claims
- 0296US6987572B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2003·Granted Jan 17, 2006·143 cites·26 claims
- 0394US6689519B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2001·Granted Feb 10, 2004·75 cites·28 claims
- 0491US7352453B2Method for process optimization and control by comparison between 2 or more measured scatterometry signalsKLA TENCOR TECH CORP·Filed 2004·Granted Apr 1, 2008·56 cites·33 claims
- 0565US7767956B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2008·Granted Aug 3, 2010·1 cites·19 claims
- 0664US7462814B2Methods and systems for lithography process controlKLA TENCOR TECH CORP·Filed 2006·Granted Dec 9, 2008·1 cites·21 claims
- 0740US2004005507A1Methods and systems for lithography process controlKLA TENCOR INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →