Inventor · disambiguated record
Wayne Fitzgerald
Also filed as: FITZGERALD WAYNE · FITZGERALD WAYNE H
7 granted patents·99 citations·filing 1998–2021
77Inventor score
Top patents by PatentIndex Score
7 records- 0190US5888050APrecision high pressure control assemblySUPERCRITICAL FLUID TECHNOLOGI·Filed 1998·Granted Mar 30, 1999·98 cites·14 claims
- 0275US11126096B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2018·Granted Sep 21, 2021·1 cites·36 claims
- 0370US11531279B2System and method for optimizing a lithography exposure processONTO INNOVATION INC·Filed 2021·Granted Dec 20, 2022·0 cites·15 claims
- 0446US10553504B2Inspection of substratesRUDOLPH TECH INC·Filed 2018·Granted Feb 4, 2020·0 cites·17 claims
- 0542US10466179B2Semiconductor device inspection of metallic discontinuitiesRUDOLPH TECH INC·Filed 2018·Granted Nov 5, 2019·0 cites·12 claims
- 0641US11315832B2Wafer singulation process controlRUDOLPH TECH INC·Filed 2016·Granted Apr 26, 2022·0 cites·18 claims
- 0717US10528961B2System and method for estimating a move using object measurementsVIRTUAL MOVING TECH·Filed 2015·Granted Jan 7, 2020·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →