Inventor · disambiguated record
Vidyasagar Anantha
Also filed as: ANANTHA VIDYASAGAR
6 granted patents·15 citations·filing 2013–2018
73Inventor score
Files withKLA TENCOR CORP6
Top patents by PatentIndex Score
6 records- 0187US8948494B2Unbiased wafer defect samplesKLA TENCOR CORP·Filed 2013·Granted Feb 3, 2015·6 cites·20 claims
- 0280US9714905B1Wafer inspection recipe setupKLA TENCOR CORP·Filed 2014·Granted Jul 25, 2017·8 cites·31 claims
- 0369US10692690B2Care areas for improved electron beam defect detectionKLA TENCOR CORP·Filed 2017·Granted Jun 23, 2020·1 cites·20 claims
- 0445US10620134B2Creating defect samples for array regionsKLA TENCOR CORP·Filed 2018·Granted Apr 14, 2020·0 cites·21 claims
- 0537US9582869B2Dynamic binning for diversification and defect discoveryKLA TENCOR CORP·Filed 2015·Granted Feb 28, 2017·0 cites·37 claims
- 0633US10018571B2System and method for dynamic care area generation on an inspection toolKLA TENCOR CORP·Filed 2016·Granted Jul 10, 2018·0 cites·47 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →