Inventor · disambiguated record
Jen Sern Lew
Also filed as: LEW JEN SERN
8 granted patents·1 pending application·4 citations·filing 2014–2018
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0177US9845533B2Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneityAPPLIED MATERIALS INC·Filed 2014·Granted Dec 19, 2017·3 cites·9 claims
- 0265US9818624B2Methods and apparatus for correcting substrate deformityAPPLIED MATERIALS INC·Filed 2016·Granted Nov 14, 2017·1 cites·20 claims
- 0357US9993853B2Method and apparatus for backside cleaning of substratesAPPLIED MATERIALS INC·Filed 2014·Granted Jun 12, 2018·0 cites·17 claims
- 0454US10549324B2Method and apparatus for backside cleaning of substratesAPPLIED MATERIALS INC·Filed 2018·Granted Feb 4, 2020·0 cites·10 claims
- 0551US11111583B2Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneityAPPLIED MATERIALS INC·Filed 2017·Granted Sep 7, 2021·0 cites·20 claims
- 0645US10607870B2Substrate carrier for active/passive bonding and de-bonding of a substrateAPPLIED MATERIALS INC·Filed 2016·Granted Mar 31, 2020·0 cites·17 claims
- 0739US10978334B2Sealing structure for workpiece to substrate bonding in a processing chamberAPPLIED MATERIALS INC·Filed 2015·Granted Apr 13, 2021·0 cites·18 claims
- 0839US9740111B2Electrostatic carrier for handling substrates for processingSUNDARRAJAN ARVIND·Filed 2014·Granted Aug 22, 2017·0 cites·20 claims
- 0931US2016236245A1Self-cleaning substrate contact surfacesAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →