Inventor · disambiguated record
H. Alexander Anderson
Also filed as: ANDERSON H ALEXANDER
7 granted patents·1 pending application·379 citations·filing 1994–2003
89Inventor score
Top patents by PatentIndex Score
8 records- 0190US6726429B2Local store for a wafer processing stationVERTICAL SOLUTIONS INC·Filed 2002·Granted Apr 27, 2004·95 cites·17 claims
- 0288US5651823AClustered photolithography systemSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jul 29, 1997·128 cites·23 claims
- 0376US5947802AWafer shuttle systemAPLEX INC·Filed 1997·Granted Sep 7, 1999·46 cites·10 claims
- 0473US5935768AMethod of processing a substrate in a photolithography system utilizing a thermal process moduleSEMICONDUCTOR SYSTEMS INC·Filed 1997·Granted Aug 10, 1999·40 cites·24 claims
- 0562US5957764AModular wafer polishing apparatus and methodAPLEX INC·Filed 1997·Granted Sep 28, 1999·25 cites·23 claims
- 0661US5553994AThermal process module for substrate coat/develop systemSEMICONDUCTOR SYSTEMS INC·Filed 1994·Granted Sep 10, 1996·29 cites·8 claims
- 0750US6149512ALinear pad conditioning apparatusAPLEX INC·Filed 1997·Granted Nov 21, 2000·16 cites·19 claims
- 0836US2003194297A1Local store for a wafer processing stationFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →