Assignee
SEMICONDUCTOR SYSTEMS INC
US·11 granted patents·606 citations·filing 1992–1997
Top patents by PatentIndex Score
11 records- 0191US5472502AApparatus and method for spin coating wafers and the likeSEMICONDUCTOR SYSTEMS INC·Filed 1993·Granted Dec 5, 1995·174 cites·20 claims
- 0288US5651823AClustered photolithography systemSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jul 29, 1997·128 cites·23 claims
- 0382US5766824AMethod and apparatus for curing photoresistSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Jun 16, 1998·82 cites·16 claims
- 0473US5935768AMethod of processing a substrate in a photolithography system utilizing a thermal process moduleSEMICONDUCTOR SYSTEMS INC·Filed 1997·Granted Aug 10, 1999·40 cites·24 claims
- 0569US5289222ADrain arrangement for photoresist coating apparatusSEMICONDUCTOR SYSTEMS INC·Filed 1992·Granted Feb 22, 1994·24 cites·5 claims
- 0661US5553994AThermal process module for substrate coat/develop systemSEMICONDUCTOR SYSTEMS INC·Filed 1994·Granted Sep 10, 1996·29 cites·8 claims
- 0761US5443348ACassette input/output unit for semiconductor processing systemSEMICONDUCTOR SYSTEMS INC·Filed 1993·Granted Aug 22, 1995·39 cites·9 claims
- 0856US5885661ADroplet jet method for coating flat substrates with resist or similar materialsSEMICONDUCTOR SYSTEMS INC·Filed 1995·Granted Mar 23, 1999·22 cites·4 claims
- 0955US5798140AOscillatory chuck method and apparatus for coating flat substratesSEMICONDUCTOR SYSTEMS INC·Filed 1996·Granted Aug 25, 1998·22 cites·6 claims
- 1052US5392989ANozzle assembly for dispensing liquidSEMICONDUCTOR SYSTEMS INC·Filed 1994·Granted Feb 28, 1995·23 cites·9 claims
- 1151US5427820AThermal control line for delivering liquid to a point of use in a photolithography systemSEMICONDUCTOR SYSTEMS INC·Filed 1993·Granted Jun 27, 1995·23 cites·14 claims
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