Inventor · disambiguated record
Shigeru Serikawa
Also filed as: SERIKAWA SHIGERU
9 granted patents·15 pending applications·68 citations·filing 1999–2014
86Inventor score
Files withHITACHI HIGH TECH CORP11SASAZAWA HIDEAKI4SERIKAWA SHIGERU4HARIYAMA TATSUO1HITACHI ELECTR ENG1
Top patents by PatentIndex Score
24 records- 0193US7969567B2Method and device for detecting shape of surface of mediumHITACHI HIGH TECH CORP·Filed 2009·Granted Jun 28, 2011·18 cites·13 claims
- 0289US8018585B2Surface defect inspecting apparatus with defect detection optical system and defect-detected image processingHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 13, 2011·20 cites·15 claims
- 0376US7898652B2Method and apparatus for detecting defects on a disk surfaceHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 1, 2011·4 cites·20 claims
- 0469US8411928B2Scatterometry method and device for inspecting patterned mediumSASAZAWA HIDEAKI·Filed 2009·Granted Apr 2, 2013·2 cites·11 claims
- 0567US8781758B2Optical inspection method and its apparatusSERIKAWA SHIGERU·Filed 2011·Granted Jul 15, 2014·3 cites·14 claims
- 0667US8253935B2Disk surface inspection apparatus, inspection system thereof, and inspection method thereofHARIYAMA TATSUO·Filed 2010·Granted Aug 28, 2012·2 cites·15 claims
- 0766US8638430B2Method for defect determination in fine concave-convex pattern and method for defect determination on patterned mediumSASAZAWA HIDEAKI·Filed 2010·Granted Jan 28, 2014·2 cites·12 claims
- 0852US7612888B2Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plateHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 3, 2009·2 cites·6 claims
- 0951US2008239904A1Method and apparatus for inspecting a surface of a specimenYOSHIDA MINORU·Filed 2008·Application pending·0 cites
- 1048US2016216216A1Magnetic disk inspection device and magnetic disk inspection methodHITACHI HIGH-TECH FINE SYSTEMS CORP·Filed 2014·Application pending·0 cites
- 1144US6295131B1Interference detecting system for use in interferometerHITACHI ELECTR ENG·Filed 1999·Granted Sep 25, 2001·15 cites·7 claims
- 1244US2008080346A1Detection method of peripheral surface defect of disk and detection device thereofSERIKAWA SHIGERU·Filed 2007·Application pending·0 cites
- 1342US2008088830A1Optical system of detecting peripheral surface defect of glass disk and device of detecting peripheral surface defect thereofSERIKAWA SHIGERU·Filed 2007·Application pending·0 cites
- 1441US2014043603A1Surface inspecting apparatus having double recipe processing functionHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 1541US2007222975A1Testing method for surface defects on disc and testing apparatus for the sameSERIKAWA SHIGERU·Filed 2007·Application pending·0 cites
- 1641US2013286386A1Optical surface defect inspection apparatus and optical surface defect inspection methodHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 1741US2014071442A1Optical surface defect inspection apparatus and optical surface defect inspection methodHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 1840US2013258328A1Disk surface inspection method and disk surface inspection deviceHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 1940US2013258327A1Method and apparatus for inspecting surface of a sampleHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 2039US2011272096A1Pattern shape inspection instrument and pattern shape inspection method, instrument for inspecting stamper for patterned media and method of inspecting stamper for patterned media, and patterned media disk manufacturing lineHITACHI HIGH TECH CORP·Filed 2011·Application pending·0 cites
- 2139US2013077092A1Substrate surface defect inspection method and inspection deviceSASAZAWA HIDEAKI·Filed 2012·Application pending·0 cites
- 2235US2012287426A1Pattern inspection method and device for sameSASAZAWA HIDEAKI·Filed 2011·Application pending·0 cites
- 2335US2012320367A1Inspection method and device for sameYANAKA YU·Filed 2011·Application pending·0 cites
- 2435US2010246356A1Disk surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →