Inventor · disambiguated record
Mai Yamakawa
Also filed as: YAMAKAWA MAI
2 granted patents·1 pending application·10 citations·filing 2012–2014
55Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0182US8888925B2Nozzle, substrate processing apparatus, and substrate processing methodSATO MASANOBU·Filed 2012·Granted Nov 18, 2014·6 cites·3 claims
- 0273US9355872B2Substrate treatment apparatus and substrate treatment methodTANAKA TAKAYOSHI·Filed 2012·Granted May 31, 2016·4 cites·9 claims
- 0352US2015053244A1Nozzle, and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →