Inventor · disambiguated record
Nobuo Tokai
Also filed as: TOKAI NOBUO
3 granted patents·62 citations·filing 2000–2002
73Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC3
Top patents by PatentIndex Score
3 records- 0179US7393417B1Semiconductor-manufacturing apparatusAPPLIED MATERIALS INC·Filed 2000·Granted Jul 1, 2008·30 cites·6 claims
- 0276US6884464B2Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamberAPPLIED MATERIALS INC·Filed 2002·Granted Apr 26, 2005·21 cites·20 claims
- 0366US6566199B2Method and system for forming film, semiconductor device and fabrication method thereofAPPLIED MATERIALS INC·Filed 2001·Granted May 20, 2003·11 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →