Inventor · disambiguated record
Masato Toshima
Also filed as: TOSHIMA MASATO · TOSHIMA MASATO M
34 granted patents·5 pending applications·4,686 citations·filing 1987–2017
98Inventor score
Files withAPPLIED MATERIALS INC16GAMMA PRECISION TECHNOLOGY INC4ORBOTECH LT SOLAR LLC4BLONIGAN WENDELL THOMAS2LAW KAM S2
Top patents by PatentIndex Score
39 records- 0198US5882165AMultiple chamber integrated process systemAPPLIED MATERIALS INC·Filed 1997·Granted Mar 16, 1999·789 cites·8 claims
- 0298US4951601AMulti-chamber integrated process systemAPPLIED MATERIALS INC·Filed 1989·Granted Aug 28, 1990·1.3k cites·22 claims
- 0398US4785962AVacuum chamber slit valveAPPLIED MATERIALS INC·Filed 1987·Granted Nov 22, 1988·137 cites·11 claims
- 0497US6518195B1Plasma reactor using inductive RF coupling, and processesAPPLIED MATERIALS INC·Filed 2000·Granted Feb 11, 2003·162 cites·8 claims
- 0597US5556501ASilicon scavenger in an inductively coupled RF plasma reactorAPPLIED MATERIALS INC·Filed 1993·Granted Sep 17, 1996·396 cites·15 claims
- 0696US6488807B1Magnetic confinement in a plasma reactor having an RF bias electrodeAPPLIED MATERIALS INC·Filed 2000·Granted Dec 3, 2002·145 cites·6 claims
- 0796US5292393AMultichamber integrated process systemAPPLIED MATERIALS INC·Filed 1991·Granted Mar 8, 1994·386 cites·11 claims
- 0894US6007675AWafer transfer system and method of using the sameGAMMA PRECISION TECHNOLOGY INC·Filed 1997·Granted Dec 28, 1999·158 cites·17 claims
- 0994US5186594ADual cassette load lockAPPLIED MATERIALS INC·Filed 1990·Granted Feb 16, 1993·199 cites·3 claims
- 1093US8444364B2Auto-sequencing multi-directional inline processing apparatusBLONIGAN WENDELL THOMAS·Filed 2010·Granted May 21, 2013·17 cites·19 claims
- 1193US6545420B1Plasma reactor using inductive RF coupling, and processesAPPLIED MATERIALS INC·Filed 1995·Granted Apr 8, 2003·135 cites·13 claims
- 1293US6068784AProcess used in an RF coupled plasma reactorAPPLIED MATERIALS INC·Filed 1993·Granted May 30, 2000·173 cites·28 claims
- 1392US6251792B1Plasma etch processesAPPLIED MATERIALS INC·Filed 1997·Granted Jun 26, 2001·122 cites·18 claims
- 1489US7695233B2Substrate processing apparatusORBOTECH LT SOLAR LLC·Filed 2006·Granted Apr 13, 2010·16 cites·14 claims
- 1589US5944940AWafer transfer system and method of using the sameGAMMA PRECISION TECHNOLOGY INC·Filed 1997·Granted Aug 31, 1999·91 cites·2 claims
- 1684US5900105AWafer transfer system and method of using the sameGAMMA PRECISION TECHNOLOGY INC·Filed 1996·Granted May 4, 1999·75 cites·27 claims
- 1782US9287152B2Auto-sequencing multi-directional inline processing methodORBOTECH LT SOLAR LLC·Filed 2013·Granted Mar 15, 2016·4 cites·18 claims
- 1882US5769588ADual cassette load lockAPPLIED MATERIALS INC·Filed 1996·Granted Jun 23, 1998·47 cites·5 claims
- 1980US8672603B2Auto-sequencing inline processing apparatusBLONIGAN WENDELL THOMAS·Filed 2010·Granted Mar 18, 2014·4 cites·20 claims
- 2080US6454519B1Dual cassette load lockAPPLIED MATERIALS INC·Filed 1997·Granted Sep 24, 2002·42 cites·9 claims
- 2180US6146469AApparatus and method for cleaning semiconductor wafersGAMMA PREC TECHNOLOGY·Filed 1998·Granted Nov 14, 2000·65 cites·8 claims
- 2277US8617349B2Showerhead assembly for plasma processing chamberLAW KAM S·Filed 2010·Granted Dec 31, 2013·6 cites·29 claims
- 2375US6599076B2Dual cassette load lockAPPLIED MATERIALS INC·Filed 2002·Granted Jul 29, 2003·12 cites·4 claims
- 2475US5308417AUniformity for magnetically enhanced plasma chambersAPPLIED MATERIALS INC·Filed 1991·Granted May 3, 1994·63 cites·14 claims
- 2571US8998552B2Processing apparatus and processing methodTOSHIMA MASATO·Filed 2009·Granted Apr 7, 2015·5 cites·26 claims
- 2664US6454508B2Dual cassette load lockAPPLIED MATERIALS INC·Filed 1998·Granted Sep 24, 2002·20 cites·15 claims
- 2764US6224680B1Wafer transfer systemGAMMA PREC TECHNOLOGY INC·Filed 1999·Granted May 1, 2001·34 cites·19 claims
- 2864US5753133AMethod and apparatus for etching film layers on large substratesAPPLIED KOMATSU TECHNOLOGY INC·Filed 1994·Granted May 19, 1998·36 cites·35 claims
- 2959US6860710B1Lifting mechanism for integrated circuit fabrication systemsNOVELLUS SYSTEMS INC·Filed 2003·Granted Mar 1, 2005·7 cites·7 claims
- 3059US5585729AFluid concentration detecting apparatusGAMMA PRECISION TECHNOLOGY INC·Filed 1993·Granted Dec 17, 1996·22 cites·31 claims
- 3152US6352937B1Method for stripping organic based filmSONY CORP·Filed 1998·Granted Mar 5, 2002·16 cites·18 claims
- 3252US2006245854A1Dual cassette load lockTOSHIMA MASATO M·Filed 2006·Application pending·0 cites
- 3349US10333104B2Method and apparatus for encapsulation of an organic light emitting diodeORBOTECH LT SOLAR LLC·Filed 2017·Granted Jun 25, 2019·0 cites·18 claims
- 3449US6028777AHigh frequency power supply generatorBETEK MANUFACTURING INC·Filed 1998·Granted Feb 22, 2000·20 cites·22 claims
- 3545US5288645AHydrogen evolution analyzerMTM ENGINEERING INC·Filed 1992·Granted Feb 22, 1994·11 cites·15 claims
- 3645US2008196666A1Shower head and cvd apparatus using the sameTOSHIMA MASATO·Filed 2007·Application pending·0 cites
- 3742US2014064886A1System, architecture and method for simultaneous transfer and process of substratesORBOTECH LT SOLAR LLC·Filed 2013·Application pending·0 cites
- 3842US2007151516A1Chemical vapor deposition apparatus and electrode plate thereofLAW KAM S·Filed 2006·Application pending·0 cites
- 3930US2002004309A1Processes used in an inductively coupled plasma reactorFiled 1999·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Masato Toshima files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →