Inventor · disambiguated record
Ben Pang
Also filed as: PANG BEN
4 granted patents·457 citations·filing 1995–2000
84Inventor score
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
4 records- 0196US6193802B1Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipmentAPPLIED MATERIALS INC·Filed 1996·Granted Feb 27, 2001·191 cites·34 claims
- 0296US6194628B1Method and apparatus for cleaning a vacuum line in a CVD systemAPPLIED MATERIALS INC·Filed 1995·Granted Feb 27, 2001·170 cites·40 claims
- 0393US6680420B2Apparatus for cleaning an exhaust line in a semiconductor processing systemAPPLIED MATERIALS INC·Filed 2000·Granted Jan 20, 2004·45 cites·13 claims
- 0491US6689930B1Method and apparatus for cleaning an exhaust line in a semiconductor processing systemAPPLIED MATERIALS INC·Filed 2000·Granted Feb 10, 2004·51 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →