Inventor · disambiguated record
Rich Wise
Also filed as: WISE RICH
4 granted patents·2 pending applications·7 citations·filing 2003–2020
62Inventor score
Top patents by PatentIndex Score
6 records- 0157US7344991B2Method and apparatus for multilayer photoresist dry developmentTOKYO ELECTRON LTD·Filed 2003·Granted Mar 18, 2008·6 cites·7 claims
- 0254US8048325B2Method and apparatus for multilayer photoresist dry developmentTOKYO ELECTRON LTD·Filed 2008·Granted Nov 1, 2011·1 cites·7 claims
- 0350US12372872B2Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generationLAM RES CORP·Filed 2020·Granted Jul 29, 2025·0 cites·13 claims
- 0445US10885253B2System and method for determining dimensional range of repairable defects by deposition and etching in a virtual fabrication environmentCOVENTOR INC·Filed 2019·Granted Jan 5, 2021·0 cites·21 claims
- 0537US2005136666A1Method and apparatus for etching an organic layerIBM·Filed 2004·Application pending·0 cites
- 0636US2007056927A1Process and system for etching doped siliconTSOU LEN Y·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →