Inventor · disambiguated record
Dhritiman Subha Kashyap
Also filed as: KASHYAP DHRITIMAN S · KASHYAP DHRITIMAN SUBHA
21 granted patents·11 pending applications·68 citations·filing 2012–2024
92Inventor score
Top patents by PatentIndex Score
32 records- 0197US11430686B2Pedestal heater for spatial multi-wafer processing toolAPPLIED MATERIALS INC·Filed 2020·Granted Aug 30, 2022·5 cites·19 claims
- 0295US11584993B2Thermally uniform deposition stationAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·4 cites·18 claims
- 0395US9447499B2Dual plenum, axi-symmetric showerhead with edge-to-center gas deliveryROY SHAMBHU N·Filed 2012·Granted Sep 20, 2016·24 cites·19 claims
- 0494US11110425B2Gas distribution plate for thermal depositionAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·4 cites·20 claims
- 0593USD1080812SGas mixerAPPLIED MATERIALS INC·Filed 2022·Granted Jun 24, 2025·6 cites·1 claims
- 0691US11583816B2Gas distribution plate for thermal depositionAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·18 claims
- 0789US11818810B2Heater assembly with purge gap control and temperature uniformity for batch processing chambersAPPLIED MATERIALS INC·Filed 2021·Granted Nov 14, 2023·2 cites·8 claims
- 0887USD1037778SGas distribution plateAPPLIED MATERIALS INC·Filed 2022·Granted Aug 6, 2024·13 cites·1 claims
- 0981US9353439B2Cascade design showerhead for transient uniformityNOVELLUS SYSTEMS INC·Filed 2013·Granted May 31, 2016·7 cites·35 claims
- 1080US11586789B2Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·13 claims
- 1173US11769684B2Wafer heater with backside and integrated bevel purgeAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·0 cites·18 claims
- 1273US2025069915A1Substrate degas stationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1373US2025069914A1Substrate degas stationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1472US11682576B2Pedestal heater for spatial multi-wafer processing toolAPPLIED MATERIALS INC·Filed 2022·Granted Jun 20, 2023·0 cites·20 claims
- 1571US11098404B2Multi-station chamber lid with precise temperature and flow controlAPPLIED MATERIALS INC·Filed 2019·Granted Aug 24, 2021·1 cites·17 claims
- 1668US12442079B2Dual channel showerhead assemblyAPPLIED MATERIALS INC·Filed 2022·Granted Oct 14, 2025·0 cites·12 claims
- 1762US11479855B2Spatial wafer processing with improved temperature uniformityAPPLIED MATERIALS INC·Filed 2020·Granted Oct 25, 2022·0 cites·10 claims
- 1861US10787739B2Spatial wafer processing with improved temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Sep 29, 2020·0 cites·16 claims
- 1961US2025122622A1Showerhead design for plasma-enhanced depositionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2060US2025191897A1Cross flow gas delivery for particle reductionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2159US11549183B2Showerhead with inlet mixerAPPLIED MATERIALS INC·Filed 2020·Granted Jan 10, 2023·0 cites·20 claims
- 2257US2025246447A1Choke plates for semiconductor manufacturing processing chambersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2357US2021111059A1Wafer Heater With Backside And Integrated Bevel PurgeAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2457US2024068095A1Gas distribution apparatuses for improving mixing uniformityAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2557US2015345019A1Method and apparatus for improving gas flow in a substrate processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2656US2020230782A1Method and Apparatus for cleaning a substrateAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2755US2024068096A1Showerhead Assembly with Heated ShowerheadAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2854US10910243B2Thermal management systemAPPLIED MATERIALS INC·Filed 2019·Granted Feb 2, 2021·0 cites·20 claims
- 2948US12308218B2Thermal shield for processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted May 20, 2025·0 cites·15 claims
- 3044US2016322239A1Methods and Apparatus for Cleaning a SubstrateAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 3128USD1103948SGas distribution plateAPPLIED MATERIALS INC·Filed 2021·Granted Dec 2, 2025·0 cites·1 claims
- 3228USD1104086SGas distribution plateAPPLIED MATERIALS INC·Filed 2021·Granted Dec 2, 2025·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →