Inventor · disambiguated record
Akinari Morikawa
Also filed as: MORIKAWA AKINARI
6 granted patents·1 pending application·20 citations·filing 2004–2022
76Inventor score
Technology areasH01J
Top patents by PatentIndex Score
7 records- 0183US9362088B2Charged particle beam device and sample preparation methodHITACHI HIGH TECH CORP·Filed 2013·Granted Jun 7, 2016·6 cites·8 claims
- 0276US6963069B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2004·Granted Nov 8, 2005·11 cites·20 claims
- 0370US7459683B2Charged particle beam device with DF-STEM image valuation methodHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 2, 2008·3 cites·13 claims
- 0469US2022402000A1Charged Particle Beam Apparatus and Cleaning MethodHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0559US7964845B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 21, 2011·0 cites·7 claims
- 0655US11458513B2Charged particle beam apparatus and cleaning methodHITACHI HIGH TECH CORP·Filed 2017·Granted Oct 4, 2022·0 cites·12 claims
- 0736US8546770B2Charged particle beam device and sample observation methodMORIKAWA AKINARI·Filed 2010·Granted Oct 1, 2013·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →