Inventor · disambiguated record
G. Grant Peng
Also filed as: PENG G GRANT
3 granted patents·1 pending application·8 citations·filing 2005–2014
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0175US8679252B2Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereofSHIH HONG·Filed 2005·Granted Mar 25, 2014·5 cites·10 claims
- 0263US8051863B2Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscusLAM RES CORP·Filed 2008·Granted Nov 8, 2011·2 cites·15 claims
- 0355US8287656B2Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscusPENG G GRANT·Filed 2011·Granted Oct 16, 2012·1 cites·9 claims
- 0450US2014148013A1Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereofLAM RES CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →