Inventor · disambiguated record
Martin Klein
Also filed as: KLEIN MARTIN · KLEIN MARTIN P
6 granted patents·2 pending applications·96 citations·filing 2001–2019
82Inventor score
Files withNEXX SYSTEMS PACKAGING LLC3FREIBERGER COMPOUND MAT GMBH2FLUENS CORP1NEXX SYSTEMS INC1VEECO INSTR INC1
Top patents by PatentIndex Score
8 records- 0188US7100954B2Ultra-thin wafer handling systemNEXX SYSTEMS INC·Filed 2003·Granted Sep 5, 2006·51 cites·37 claims
- 0273US6682288B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Jan 27, 2004·18 cites·4 claims
- 0372US6530733B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Mar 11, 2003·17 cites·30 claims
- 0467US10309037B2Method for producing III-N templates and the reprocessing thereof and III-N templateFREIBERGER COMPOUND MAT GMBH·Filed 2013·Granted Jun 4, 2019·1 cites·17 claims
- 0563US10883191B2Method for producing III-N templates and the reprocessing thereof and III-N templateFREIBERGER COMPOUND MAT GMBH·Filed 2019·Granted Jan 5, 2021·0 cites·14 claims
- 0662US6821912B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Nov 23, 2004·9 cites·17 claims
- 0759US2010291308A1Web Substrate Deposition SystemVEECO INSTR INC·Filed 2009·Application pending·0 cites
- 0852US2007151842A1Apparatus for reactive sputteringFLUENS CORP·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →