Assignee
NEXX SYSTEMS PACKAGING LLC
US·5 granted patents·137 citations·filing 1999–2001
Top patents by PatentIndex Score
5 records- 0185US6328858B1Multi-layer sputter deposition apparatusNEXX SYSTEMS PACKAGING LLC·Filed 1999·Granted Dec 11, 2001·49 cites·23 claims
- 0283US6396024B1Permanent magnet ECR plasma source with integrated multipolar magnetic confinementNEXX SYSTEMS PACKAGING LLC·Filed 1999·Granted May 28, 2002·44 cites·15 claims
- 0373US6682288B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Jan 27, 2004·18 cites·4 claims
- 0472US6530733B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Mar 11, 2003·17 cites·30 claims
- 0562US6821912B2Substrate processing pallet and related substrate processing method and machineNEXX SYSTEMS PACKAGING LLC·Filed 2001·Granted Nov 23, 2004·9 cites·17 claims
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