Inventor · disambiguated record
Kurt Decker-Lucke
Also filed as: DECKER-LUCKE KURT · DECKER-LUCKE KURT T
5 granted patents·17 citations·filing 2012–2022
74Inventor score
Top patents by PatentIndex Score
5 records- 0190US8853653B1Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 7, 2014·6 cites·16 claims
- 0276US8722431B2FinFET device fabrication using thermal implantationPRADHAN NILAY ANIL·Filed 2012·Granted May 13, 2014·7 cites·20 claims
- 0376US8592786B2Platen clamping surface monitoringVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 26, 2013·3 cites·17 claims
- 0464US9006692B2Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 14, 2015·1 cites·14 claims
- 0557US12444615B2Forming a doped hardmaskAPPLIED MATERIALS INC·Filed 2022·Granted Oct 14, 2025·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →