Inventor · disambiguated record
Reyn Tetsuro Wakabayashi
Also filed as: WAKABAYASHI REYN · WAKABAYASHI REYN T · WAKABAYASHI REYN TETSURO
5 granted patents·11 pending applications·14 citations·filing 2017–2024
69Inventor score
Files withAPPLIED MATERIALS INC16
Top patents by PatentIndex Score
16 records- 0194US10847347B2Edge ring assembly for a substrate support in a plasma processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Nov 24, 2020·12 cites·16 claims
- 0276US10636629B2Split slit liner doorAPPLIED MATERIALS INC·Filed 2017·Granted Apr 28, 2020·2 cites·20 claims
- 0365US2025276335A1Bonded showerhead assembly and method for using the sameAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0463US2021043428A1Edge ring assembly for a substrate support in a plasma processing chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 0551US12068137B2Thread profiles for semiconductor process chamber componentsAPPLIED MATERIALS INC·Filed 2020·Granted Aug 20, 2024·0 cites·17 claims
- 0651US2024203695A1Fast gas switchingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0750US12451331B2Showerhead assembly with recursive gas channelsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
- 0850US11551960B2Helical plug for reduction or prevention of arcing in a substrate supportAPPLIED MATERIALS INC·Filed 2020·Granted Jan 10, 2023·0 cites·12 claims
- 0950US2022093362A1Showerhead assembly with recursive gas channelsAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1049US2021238744A1Shower head assemblyAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1146US2021287881A1Methods and apparatus for tuning semiconductor processesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1246US2021331183A1Fasteners for coupling components of showerhead assembliesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1345US2021238746A1Showerhead assemblyAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1445US2021238745A1Showerhead assemblyAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1545US2020411355A1Apparatus for reduction or prevention of arcing in a substrate supportAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1643US2020365375A1Stray plasma prevention apparatus for substrate process chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →