Inventor · disambiguated record
Chang-Hyeon Nam
Also filed as: NAM CHANG-HYEON
15 granted patents·5 pending applications·54 citations·filing 2002–2021
89Inventor score
Top patents by PatentIndex Score
20 records- 0183US6983755B2Cleaning method and cleaning apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Jan 10, 2006·27 cites·15 claims
- 0278US11839839B2Apparatus and system for filtrating liquidXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Dec 12, 2023·3 cites·17 claims
- 0377US11233058B2Semiconductor device and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Jan 25, 2022·2 cites·8 claims
- 0469US11081489B2Semiconductor structure and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Aug 3, 2021·1 cites·11 claims
- 0564US11659706B2Semiconductor device and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2021·Granted May 23, 2023·0 cites·8 claims
- 0664US7887636B2Substrate dryer and a drying methodSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Feb 15, 2011·2 cites·15 claims
- 0762US7166183B2Apparatus and method for treating edge of substrateSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jan 23, 2007·10 cites·19 claims
- 0859US10964703B2Semiconductor device and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Mar 30, 2021·0 cites·9 claims
- 0959US7255115B2Apparatus for cleaning semiconductor wafersSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 14, 2007·9 cites·17 claims
- 1058US11164874B2Semiconductor device and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Nov 2, 2021·0 cites·8 claims
- 1148US11724236B2System and method for fluid preparationXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Aug 15, 2023·0 cites·9 claims
- 1248US2006076034A1Cleaning method and cleaning apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 1346US11342204B2Method and apparatus for cleaning semiconductor wafersXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted May 24, 2022·0 cites·9 claims
- 1444US11031476B2Semiconductor device and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Jun 8, 2021·0 cites·10 claims
- 1544US2021217652A1Semiconductor structure and method of forming thereofXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2020·Application pending·0 cites
- 1643US2020203209A1Apparatus and system for wafer spin processXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Application pending·0 cites
- 1742US7811921B2Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Oct 12, 2010·0 cites·16 claims
- 1837US7545046B2Semiconductor devices having a trench in a side portion of a conducting line pattern and methods of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jun 9, 2009·0 cites·16 claims
- 1937US2006169300A1Method of and apparatus for heating liquid used in the manufacturing of semiconductor devices, and method of processing substrates with heated liquidAHN DUK-MIN·Filed 2006·Application pending·0 cites
- 2035US2003079763A1Apparatus for cleaning wafersFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →