Inventor · disambiguated record
Dieter Schmerek
Also filed as: SCHMEREK DIETER
4 granted patents·2 pending applications·24 citations·filing 2001–2008
69Inventor score
Top patents by PatentIndex Score
6 records- 0174US8068279B2Optical system of an illumination device of a projection exposure apparatusSCHUSTER KARL-HEINZ·Filed 2007·Granted Nov 29, 2011·10 cites·39 claims
- 0273US6825914B2System for flushing at least one internal space of an objectiveZEISS CARL SMT AG·Filed 2001·Granted Nov 30, 2004·14 cites·24 claims
- 0350US7545483B2Optical element unit for exposure processesZEISS CARL SMT AG·Filed 2008·Granted Jun 9, 2009·0 cites·82 claims
- 0447US8435726B2Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatusPAZIDIS ALEXANDRA·Filed 2008·Granted May 7, 2013·0 cites·29 claims
- 0537US2007132969A1Microlithographic projection exposure apparatus and method for introducing an immersion liquid into an immersion spaceZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
- 0632US2005195376A1System for purifying purge gasesFiled 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →