Assignee
PAZIDIS ALEXANDRA
DE·4 granted patents·10 citations·filing 2005–2010
Top patents by PatentIndex Score
4 records- 0177US8488103B2Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the samePAZIDIS ALEXANDRA·Filed 2010·Granted Jul 16, 2013·3 cites·9 claims
- 0273US8605257B2Projection system with compensation of intensity variations and compensation element thereforPAZIDIS ALEXANDRA·Filed 2005·Granted Dec 10, 2013·7 cites·45 claims
- 0347US8435726B2Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatusPAZIDIS ALEXANDRA·Filed 2008·Granted May 7, 2013·0 cites·29 claims
- 0446US8339575B2Off-axis objectives with rotatable optical elementPAZIDIS ALEXANDRA·Filed 2008·Granted Dec 25, 2012·0 cites·15 claims
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