Inventor · disambiguated record
Norihiro Itoh
Also filed as: ITO NORIHIRO · ITOH NORIHIRO
13 granted patents·30 citations·filing 2009–2023
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
13 records- 0188US8393227B2Substrate processing method, storage medium storing program for executing the same, substrate processing apparatus, and fault detection method for differential pressure flowmeterITO NORIHIRO·Filed 2011·Granted Mar 12, 2013·11 cites·13 claims
- 0284US8607807B2Liquid treatment apparatus and methodHIGASHIJIMA JIRO·Filed 2012·Granted Dec 17, 2013·7 cites·6 claims
- 0378US12202016B2Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Jan 21, 2025·0 cites·10 claims
- 0472US9105671B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2012·Granted Aug 11, 2015·3 cites·14 claims
- 0569US11826794B2Substrate cleaning apparatus, substrate cleaning method, and non-transitory computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2021·Granted Nov 28, 2023·0 cites·9 claims
- 0668US9245737B2Liquid treatment apparatus and liquid treatment methodTOKYO ELECTRON LTD·Filed 2012·Granted Jan 26, 2016·2 cites·15 claims
- 0763US9190311B2Liquid arm cleaning unit for substrate processing apparatusHIGASHIJIMA JIRO·Filed 2012·Granted Nov 17, 2015·1 cites·12 claims
- 0862US8444772B2Liquid processing apparatusITOH NORIHIRO·Filed 2009·Granted May 21, 2013·2 cites·8 claims
- 0961US9396975B2Liquid treatment apparatus and methodHIGASHIJIMA JIRO·Filed 2012·Granted Jul 19, 2016·1 cites·5 claims
- 1060US8251077B2Liquid processing apparatus, liquid processing method and storage mediumARATAKE HIDEMASA·Filed 2009·Granted Aug 28, 2012·3 cites·4 claims
- 1145US8246759B2Substrate processing apparatus, substrate processing method, and program storage mediumITOH NORIHIRO·Filed 2009·Granted Aug 21, 2012·0 cites·20 claims
- 1244US8865483B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Oct 21, 2014·0 cites·15 claims
- 1337US9064908B2Substrate liquid processing apparatus, liquid processing method, and storage mediumITOH NORIHIRO·Filed 2012·Granted Jun 23, 2015·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →