Assignee
ITO NORIHIRO
JP·8 granted patents·26 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0188US8393227B2Substrate processing method, storage medium storing program for executing the same, substrate processing apparatus, and fault detection method for differential pressure flowmeterITO NORIHIRO·Filed 2011·Granted Mar 12, 2013·11 cites·13 claims
- 0277US9768010B2Liquid treatment apparatusITO NORIHIRO·Filed 2012·Granted Sep 19, 2017·4 cites·13 claims
- 0371US8201568B2Liquid treatment apparatusITO NORIHIRO·Filed 2009·Granted Jun 19, 2012·4 cites·6 claims
- 0470US8210190B2Treatment apparatus, treatment method and storage mediumITO NORIHIRO·Filed 2008·Granted Jul 3, 2012·3 cites·5 claims
- 0569US9711380B2Liquid processing apparatus, liquid processing method and storage mediumITO NORIHIRO·Filed 2012·Granted Jul 18, 2017·2 cites·14 claims
- 0667US8950414B2Liquid processing apparatus, liquid processing method, and storage mediumITO NORIHIRO·Filed 2010·Granted Feb 10, 2015·2 cites·4 claims
- 0743US9177838B2Liquid process apparatus and liquid process methodITO NORIHIRO·Filed 2012·Granted Nov 3, 2015·0 cites·13 claims
- 0840US9691602B2Liquid process apparatus and liquid process methodITO NORIHIRO·Filed 2012·Granted Jun 27, 2017·0 cites·21 claims
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