Assignee
HIGASHIJIMA JIRO
JP·17 granted patents·2 pending applications·46 citations·filing 2007–2012
Top patents by PatentIndex Score
19 records- 0186US9355871B2Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cupHIGASHIJIMA JIRO·Filed 2012·Granted May 31, 2016·8 cites·8 claims
- 0285US8696863B2Liquid processing apparatus and liquid processing methodHIGASHIJIMA JIRO·Filed 2010·Granted Apr 15, 2014·8 cites·3 claims
- 0384US8607807B2Liquid treatment apparatus and methodHIGASHIJIMA JIRO·Filed 2012·Granted Dec 17, 2013·7 cites·6 claims
- 0483US9048269B2Substrate liquid treatment apparatus with lift pin plateHIGASHIJIMA JIRO·Filed 2011·Granted Jun 2, 2015·6 cites·14 claims
- 0583US8887741B2Liquid processing apparatus, liquid processing method and storage mediumHIGASHIJIMA JIRO·Filed 2011·Granted Nov 18, 2014·6 cites·10 claims
- 0676US8567339B2Liquid processing apparatusHIGASHIJIMA JIRO·Filed 2010·Granted Oct 29, 2013·4 cites·13 claims
- 0769US8905051B2Liquid processing apparatus and liquid processing methodHIGASHIJIMA JIRO·Filed 2012·Granted Dec 9, 2014·2 cites·10 claims
- 0868US8741099B2Liquid processing apparatusHIGASHIJIMA JIRO·Filed 2011·Granted Jun 3, 2014·2 cites·8 claims
- 0965US8409482B2Porous memberHIGASHIJIMA JIRO·Filed 2009·Granted Apr 2, 2013·0 cites·5 claims
- 1065US8313536B2Functional member having surface cleanlinessHIGASHIJIMA JIRO·Filed 2009·Granted Nov 20, 2012·0 cites·10 claims
- 1163US9190311B2Liquid arm cleaning unit for substrate processing apparatusHIGASHIJIMA JIRO·Filed 2012·Granted Nov 17, 2015·1 cites·12 claims
- 1262US9159594B2Liquid processing apparatus and liquid processing methodHIGASHIJIMA JIRO·Filed 2012·Granted Oct 13, 2015·1 cites·8 claims
- 1361US9396975B2Liquid treatment apparatus and methodHIGASHIJIMA JIRO·Filed 2012·Granted Jul 19, 2016·1 cites·5 claims
- 1449US8590547B2Liquid processing apparatusHIGASHIJIMA JIRO·Filed 2009·Granted Nov 26, 2013·0 cites·9 claims
- 1546US8298344B2Method of processing workpieces using a vessel with a low pressure space surrounding a processing space for the purpose of preventing the leakage of atmosphere into the processing spaceHIGASHIJIMA JIRO·Filed 2007·Granted Oct 30, 2012·0 cites·6 claims
- 1642US8944081B2Liquid processing apparatus and liquid processing methodHIGASHIJIMA JIRO·Filed 2012·Granted Feb 3, 2015·0 cites·8 claims
- 1739US9022045B2Substrate liquid cleaning apparatus with controlled liquid port ejection angleHIGASHIJIMA JIRO·Filed 2011·Granted May 5, 2015·0 cites·17 claims
- 1839US2012160277A1Liquid Processing Apparatus and Liquid Processing MethodHIGASHIJIMA JIRO·Filed 2011·Application pending·0 cites
- 1939US2012180829A1Liquid Processing ApparatusHIGASHIJIMA JIRO·Filed 2012·Application pending·0 cites
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